反应溅射气体对Ni、Ti薄膜成膜特性的作用机制
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连玉红, 张众, 黄秋实. 反应溅射气体对Ni、Ti薄膜成膜特性的作用机制[J]. 光学仪器, 2017, 39(1): 56. LIAN Yuhong, ZHANG Zhong, HUANG Qiushi. The effects of sputtering gas in the characterization of Ni and Ti monolayer films[J]. Optical Instruments, 2017, 39(1): 56.