Ronchi相移剪切干涉仪及其相位提取误差分析

在分析Ronchi 相移剪切干涉仪典型系统参数的基础上，系统研究了该干涉仪相位提取精度的主要影响因素。结合传统的五步相移算法，采用所提出的八步与十步相移算法，对Ronchi相移剪切干涉仪的相位提取误差进行理论分析和仿真计算。仿真结果说明，八步和十步相移算法可以有效地消除多级衍射光寄生干涉对相位提取精度的影响，且十步相移算法比八步相移算法具有更高的相位提取精度；为了提高测量精度，要求相移误差优于2%；探测器位数大于10位；光栅周期误差小于1%；光源空间相干性低于0.1。通过采用不同的相移算法、剪切率和光源空间相干性的三组对比实验，对理论分析的正确性进行了验证。

Abstract

Based on analysis of the typical system parameters of Ronchi phase shifting shearing interferometer, the main phase retrieval error sources of the interferometer are systematically studied. Combined with the traditional five-frame algorithm, retrieval phase errors of Ronchi phase-shifting shearing interferometer are analyzed and simulated with the self-designed eight-frame and ten-frame phase-shifting algorithm. The simulation results show that the ten-frame phase-shifting algorithm has a better phase retrieval accuracy than the eight-frame phase-shifting algorithm and both the two algorithms can effectively eliminate negative effects of unwanted interference from the high order diffraction light, which limits the phase retrieval accuracy. In order to improve the measurement accuracy, the following conditions should be satisfied: the phase shifting error is better than 2%, at least 10-bit quantization detector is used, the grating period error is less than 1% and the spatial coherence of light is less than 0.1. The theoretical analysis is validated by three groups of comparison experiments with different phase retrieval algorithms, shear ratios and spatial coherence of light.

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吴飞斌, 唐锋, 王向朝, 李杰, 李永. Ronchi相移剪切干涉仪及其相位提取误差分析[J]. 光学学报, 2015, 35(6): 0612004. Wu Feibin, Tang Feng, Wang Xiangzhao, Li Jie, Li Yong. Phase Retrieval Errors Analysis of Ronchi Phase-Shifting Shearing Interferometer[J]. Acta Optica Sinica, 2015, 35(6): 0612004.

Ronchi相移剪切干涉仪及其相位提取误差分析

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