接触触发式三维微纳米探头

李瑞君; 李心愿; 向萌; 程真英; 范光照

doi:doi:10.3969/j.issn.1003-501x.2016.08.001

光电工程, 2016, 43 (8): 1, 网络出版: 2016-09-12

接触触发式三维微纳米探头

A Touch Trigger 3D Probe for Micro/Nano Measurement

论文大纲

李瑞君 ^*李心愿向萌程真英范光照

作者单位

合肥工业大学仪器科学与光电工程学院，合肥 230009

摘要

为解决微电子机械系统(MEMS)器件三维尺寸高精度测量的难题，研制了一种适用于微纳米三坐标测量机的新型高精度三维接触触发式探头。该探头只用了一个基于四象限感测器的二维角度传感器即可同时实现对测球三维运动的高精度感测。介绍了探头的结构和原理，建立了探头的灵敏度模型和刚度模型，用最优化方法得出了探头结构参数的最优解。对探头的刚度、感测范围、灵敏度、稳定性及触发重复性等性能指标进行了测试。实验结果表明：探头的刚度在三轴方向基本相同 , 约为 1 mN/μm；允许触碰范围超过 12 μm；灵敏度大于 0.5 mV/nm；在恒温环境 (20±0.025)℃下，1.3 h内的位移漂移量约为 20 nm；触发测量重复性小于 40 nm(K=2)。该探头具有精度高、测力小、体积小、成本低、装调方便等优点，可被用于微纳米三坐标测量机。

Abstract

To meet the requirement of high precision 3D measurement for MEMS devices, a new high precision touch trigger probe for micro-Nano/CMM is developed. Only one Quadrant Photo Diode (QPD) based two-dimensional angle sensor was used in this probe, which can detect the ball tip’s 3D motions of the probe precisely at the same time. The probe was introduced and analyzed. The sensitivity and stiffness models of the probe were achieved, and the optimal structural parameters of the probe were obtained. Several experiments have been conducted to test the stiffness, measurement range, sensitivity and repeatability of the probe. The experimental results demonstrate that the probe has 1 mN/μm uniform stiffness in 3D, the permitted measurement range is more than 12 μm and the sensitivity is about 0.5 mV/nm in 3D. The drift is about 20 nm in 1.3 hours when the environment temperature is controlled to (20±0.025)℃, and the repeatability is less than 40 nm (K=2). The probe has the advantages of high precision, low stiffness, small size, low cost and good assembly which can be applied to Micro/Nano CMM.

参考文献

[1] BOS E J C. Aspects of tactile probing on the micro scale [J]. Precision Engineering(S0141-6359)，2011，35(2)：228-240.

[2] 吴俊杰，李源，李东升，等 . MEMS电容式三维微触觉测头设计及校准 [J].光学精密工程， 2013，21(12)：3088-3093. WU Junjie，LI Yuan，LI Dongsheng，et al. Design and calibration of 3D micro tactile probe based on MEMS capacitance sensor [J]. Optics and Precision Engineering，2013，21(12)：3088-3093.

[3] FAN Kuangchao，FEI Yeitai，YU Xiaofen，et al. Development of a Low-Cost Micro-CMM for 3D Micro and Nano-measurements [J]. Measurement Science & Technology(S0957-0233)，2006，17(3)：524–532.

[4] J.ger G，Manske E，Hausotte T. Nano positioning and measuring machine [J]. Measurement(S0263-2241)，2010，43(9)： 1099–1105.

[5] Takamasu K，Furutani K R. Development of nano-CMM (coordinate measuring machine with nanometer resolution) [C]// Proceedings of the XIV IMEKO World Congress(Finland)，Tampere，Finland，June 1–6，1997: 34–39.

[6] CHU Chih-Liang，CHIU Chenyu. Development of a low-cost nanoscale touch trigger probe based on two commercial DVD pick-up heads [J]. Measurement Science & Technology(S0957-0233)，2007，18(7)：1831–1842.

[7] CUI Jiwen，LI Lei，TAN Jiubin. Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios [J]. Optics Letters(S0146-9592)，2011，36(23)：4689–4691.

[8] CUI Jiwen，FENG Kunpeng，LI Junying，et al. Development of a double fiber probe with a single fiber Bragg grating for dimensional measurement of microholes with high aspect ratios [J]. Optics Letters(S0146-9592)，2014，39(10)：2868–2871.

[9] Liebrich T，Knapp W. New concept of a 3D-probing system for micro-components [J]. Annals of the CIRP(S0007-8506)， 2010，59(1)：513–516.

[10] Michihata M，Takaya Y，Hayashi T. Nano position sensing based on laser trapping technique for flat surfaces [J]. Measurement Science & Technology(S0957-0233)，2008，19(8)：817–822.

[11] Hughes E B，WilsonA，Peggs G N. Design of high accuracy CMM based on multilateration techniques [J]. Annals of the CIRP(S0007-8506)，2000，49(1)：391–394.

[12] Muralikrishnan B， Stone J A， Stoup J R. Fiber deflection probe for small hole metrology [J]. Precision Engineering(S0141-6359)，2006，30(2)：154–164.

[13] Aküng F Meli，Thalmann R. Ultraprecision micro-CMM using a low force 3D touch probe [J]. Measurement Science & Technology(S0957-0233)，2007，18(2)：319–327.

[14] Bos E J C. Aspects of tactile probing on the micro scale [J]. Precision Engineering(S0141-6359)，2011，35(2)：228–240.

[15] Dai G L，Bütefisch S，Pohlenz F，et al. A high precision micro/nano CMM using piezoresistive tactile probes [J]. Measurement Science & Technology(S0957-0233)，2009，20(8)：1118–1121.

[16] Peiner E. Tactile probes for dimensional metrology with micro components at nano meter resolution [J]. Measurement Science & Technology(S0957-0233)，2008，19(19)：579–588.

[17] 陈晓怀，陈贺，王珊，等 . 微纳测量机测头弹性机构的参数设计 [J].光学精密工程， 2013，21(10)：2588–2593. CHEN Xiaohuai，CHEN He，WANG Shan，et al. Design of elastic structure parameters of probe in micro-nano CMM [J]. Optics and Precision Engineering，2013，21(10)：2588–2593.

[18] 匡萃方，冯其波，冯俊艳，等 . 四象限探测器用作激光准直的特性分析 [J].光学技术， 2004，30(4)：387–389. KUANG Cuifang，FENG Qibo，FENG Junyan，et al. Analyzing characteristic of the four-quadrant detector applied to laser alignment [J]. Optical Technique，2004，30(4)：387–389.

[19] LI Ruijun，XIANG Meng，FAN Kuangchao，et al. Optimal design of a touch trigger probe [J]. Proceedings of SPIE(S0277-786X)，2014，94461：1-7.

[20] Wim P van Vliet，Peter H J Schellekens. Development of a fast mechanical probe for coordinate measuring machines [J]. Precision Engineering(S0141-6359)，1998，22(3)：141–152.

[21] LI Ruijun，FAN Kuangchao，ZHOU Hao，et al. Elastic mechanism design of the CMM contact probe [J]. Proceedings of SPIE(S0277-786X)，2013，89160：1–10.

李瑞君, 李心愿, 向萌, 程真英, 范光照. 接触触发式三维微纳米探头[J]. 光电工程, 2016, 43(8): 1. LI Ruijun, LI Xinyuan, XIANG Meng, CHENG Zhenying, FAN Guangzhao. A Touch Trigger 3D Probe for Micro/Nano Measurement[J]. Opto-Electronic Engineering, 2016, 43(8): 1.

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