应用光学, 2014, 35 (1): 150, 网络出版: 2014-01-17
飞秒激光湿法刻蚀微纳制造
Micro-nano fabrication of femtosecond laser wet etch
引用该论文
陈烽, 杨青, 边浩, 杜广庆, 柳克银, 孟祥卫, 邓泽方, 山超. 飞秒激光湿法刻蚀微纳制造[J]. 应用光学, 2014, 35(1): 150.
CHEN Feng, YANG Qing, BIAN Hao, DU Guang-qing, LIU Ke-yin, MENG Xiang-wei, DENG Ze-fang, SHAN Chao. Micro-nano fabrication of femtosecond laser wet etch[J]. Journal of Applied Optics, 2014, 35(1): 150.
陈烽, 杨青, 边浩, 杜广庆, 柳克银, 孟祥卫, 邓泽方, 山超. 飞秒激光湿法刻蚀微纳制造[J]. 应用光学, 2014, 35(1): 150. CHEN Feng, YANG Qing, BIAN Hao, DU Guang-qing, LIU Ke-yin, MENG Xiang-wei, DENG Ze-fang, SHAN Chao. Micro-nano fabrication of femtosecond laser wet etch[J]. Journal of Applied Optics, 2014, 35(1): 150.