飞秒激光湿法刻蚀微纳制造
陈烽, 杨青, 边浩, 杜广庆, 柳克银, 孟祥卫, 邓泽方, 山超. 飞秒激光湿法刻蚀微纳制造[J]. 应用光学, 2014, 35(1): 150.
CHEN Feng, YANG Qing, BIAN Hao, DU Guang-qing, LIU Ke-yin, MENG Xiang-wei, DENG Ze-fang, SHAN Chao. Micro-nano fabrication of femtosecond laser wet etch[J]. Journal of Applied Optics, 2014, 35(1): 150.
[1] CUMPSTON B H., ANANTHAVEL S, BARLOW S, et al. Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication[J]. Nature, 1999, 398(6722): 50-54.
[2] KAWATA S, SUN H, TANAKA T, et al. Finer features for functional microdevices[J]. Nature, 2001, 412(6847): 697-698.
[3] WU D, CHEN Q D, NIU L G, et al. 100% fill-factor aspheric microlens arrays with sub-20-nm precision[J]. IEEE Photonics Technology Letters, 2009, 21(20): 1535-1537.
[4] WU D, WU S Z, NIU L G, et al. High numerical aperture microlens arrays of close packing[J]. Applied Physics Letters, 2010, 97(3): 031109-031111.
[5] GUO R, XIAO S, ZHAI X, LI J, et al. Micro lens fabrication by means of femtosecond two photon photopolymerization[J]. Optics Express, 2006, 14(2): 810-816.
[6] LIU He-wei, CHEN Feng, WANG Xian-hua, et al. Photoetching of spherical microlenses on glasses using a femtosecond laser[J]. Optics Communications, 2009, 282(20): 4119-4123.
[7] CHEN Feng, LIU He-wei, YANG Qing, et al. Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond laser enhanced wet etching method[J]. Optics Express, 2010, 18(19): 20334-20343.
[8] LIU He-wei, CHEN Feng, YANG Qing, et al. Fabrication of bioinspired omnidirectional and gapless microlens array for wide field-of-view detections[J]. Applied Physics Letters, 2012, 100(13): 133701-133703.
[9] DU G Q, YANG Q, CHEN F, et al. Direct fabrication of seamless roller molds with gapless and shaped-controlled concave microlens arrays[J]. Optics Letters, 2012, 37(21): 4404-4406.
[10] QU PB, CHEN F, LIU HW, et al. A simple route to fabricate artificial compound eye structures[J]. Optics Express, 2012, 20(5): 5775-57782.
[11] HAO B, LIU HW, CHEN F, et al. Versatile route to gapless microlens arrays using laser-tunable wet-etched curved surfaces[J]. Optics Express, 2012, 20(12): 12939-12948.
[12] DENG ZF, CHEN F, YANG Q, et al. A facile method to fabricate close-packed concave microlens array on cylindrical glass[J]. Journal of Micromechanics and Microengineering, 2012, 22(11): 115026-115033.
[13] HE SG, CHEN F, LIU KY, et al. Fabrication of three-dimensional helical microchannels with arbitrary length and uniform diameter inside fused silica[J]. Optics Letters, 2012, 37(18): 3825-3827.
[14] HE SG, CHEN F, YANG Q, et al. Facile fabrication of true three- dimensional microcoils inside silica by a femtosecond laser[J]. Journal of Micromechanics and Microengineering, 2012, 22(10): 105017-105019.
陈烽, 杨青, 边浩, 杜广庆, 柳克银, 孟祥卫, 邓泽方, 山超. 飞秒激光湿法刻蚀微纳制造[J]. 应用光学, 2014, 35(1): 150. CHEN Feng, YANG Qing, BIAN Hao, DU Guang-qing, LIU Ke-yin, MENG Xiang-wei, DENG Ze-fang, SHAN Chao. Micro-nano fabrication of femtosecond laser wet etch[J]. Journal of Applied Optics, 2014, 35(1): 150.
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