微米光栅加速度计的加工与性能研究
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冯丽爽, 姚保寅, 刘惟芳, 王潇. 微米光栅加速度计的加工与性能研究[J]. 强激光与粒子束, 2015, 27(2): 024147. Feng Lishuang, Yao Baoyin, Liu Weifang, Wang Xiao. Fabrication and characterization of micro-grating accelerometer[J]. High Power Laser and Particle Beams, 2015, 27(2): 024147.
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