光学 精密工程, 2013, 21 (1): 108, 网络出版: 2013-03-05
大时间热响应常数投影物镜的超高精度温度控制
High precision temperature control for projection lens with long time thermal response constant
引用该论文
秦硕, 巩岩, 袁文全, 杨怀江. 大时间热响应常数投影物镜的超高精度温度控制[J]. 光学 精密工程, 2013, 21(1): 108.
QIN Shuo, GONG Yan, YUAN Wen-quan, YANG Huai-jiang. High precision temperature control for projection lens with long time thermal response constant[J]. Optics and Precision Engineering, 2013, 21(1): 108.
秦硕, 巩岩, 袁文全, 杨怀江. 大时间热响应常数投影物镜的超高精度温度控制[J]. 光学 精密工程, 2013, 21(1): 108. QIN Shuo, GONG Yan, YUAN Wen-quan, YANG Huai-jiang. High precision temperature control for projection lens with long time thermal response constant[J]. Optics and Precision Engineering, 2013, 21(1): 108.