为了提高黄光激光器的信噪比，采用Ta2O5和SiO2作为高低折射率材料，通过电子枪蒸发及离子辅助沉积技术，利用制备的589、1064、1178、1342 nm波长处分别有特定透射率的干涉截止滤光片对无用光信号进行过滤。在实际镀制过程中，由于沉积工艺条件不同，导致材料折射率的不稳定。另外监控方法易引起误差.通过调整优化工艺参数并调整膜系，有效控制膜厚监控精度，提高了对应波长的光学性能。经过高温、潮湿等恶劣环境测试，该滤光片满足黄光激光器的使用要求。

To improve the signal-to-noise ratio and filter the useless signal, Ta2O5 and SiO2 are chosen as the film materials. Electron gun and ion-assisted deposition system are used for film preparation. The interference cut-off filter films which have specific transmittance at 589, 1064, 1178, 1342 nm are deposited. In the actual coating process, the refractive indexes of materials are not stable in different conditions. In addition, the monitoring method lead to the errors. Optimizing the parameters and designing the film system can effectively control film thickness monitoring accuracy. Therefore, the optical properties corresponding to the wavelengths are enhanced. The experimental results show that the filter film can withstand high temperature, wet and other environments, completely meeting the demands of yellow laser.