红外与激光工程, 2016, 45 (5): 0520002, 网络出版: 2016-06-12  

不同退火处理的台面型In0.83Ga0.17As pin光电二极管暗电流分析

Dark current analysis of mesa type In0.83Ga0.17As p-i-n photodiodes with different annealing treatment
李平 1,2,3李淘 1,2邓双燕 1,2李雪 1,2邵秀梅 1,2唐恒敬 1,2龚海梅 1,2
作者单位
1 中国科学院上海技术物理研究所 传感技术国家重点实验室, 上海200083
2 中国科学院上海技术物理研究所 红外成像材料与器件重点实验室, 上海200083
3 中国科学院大学, 北京100049
引用该论文

李平, 李淘, 邓双燕, 李雪, 邵秀梅, 唐恒敬, 龚海梅. 不同退火处理的台面型In0.83Ga0.17As pin光电二极管暗电流分析[J]. 红外与激光工程, 2016, 45(5): 0520002.

Li Ping, Li Tao, Deng Shuangyan, Li Xue, Shao Xiumei, Tang Hengjing, Gong Haimei. Dark current analysis of mesa type In0.83Ga0.17As p-i-n photodiodes with different annealing treatment[J]. Infrared and Laser Engineering, 2016, 45(5): 0520002.

参考文献

[1] Shi Yanli, Guo Qian, Li Long, et al. Visible-extended InP/InGaAs wide spectrum response infrared detectors[J]. Infrared and Laser Engineering, 2015, 44(11): 3177-3180. (in Chinese)

[2] MacDougal M, Geske J, Wang C, et al. Low dark current InGaAs detector arrays for night vision and astronomy[C]//SPIE, 2009, 7298(3F): 1-10.

[3] Klem J F, Kim J K, Cich M J, et al. Mesa-isolated InGaAs photodetectors with low dark current [J]. Applied Physics Letters, 2009, 95: 0311121-0311123.

[4] Jae-Hyung Jang, Student Member, Gabriel Cueva, et al. Metamorphic graded bandgap InGaAs-InGaAlAs-InAlAs double heterojunction P-i-I-N photodiodes[J]. Journal of Lightwave Technology, 2002, 20(3): 507-514.

[5] Li Ping, Li Tao, Deng Shangyan, et al. Anneal treatment to improve the performance of extended wavelength In0.83Ga0.17As photodetectors[J]. Infrared Phys Technol, 2015, 71: 140-143.

[6] Cheng Jifeng, Zhu Yaoming, Tang Hengjing, et al. Microcosmic damage mechanism of inductively couple plasma etching for InGaAs[J]. Infrared and Laser Engineering, 2013, 42(8): 2186-2189. (in Chinese)

[7] Anne Rouvie, Jean-Luc Reverchon, Odile Huet, et al. InGaAs focal plane arrays developments at III-V lab[C]//SPIE, 2012, 8353(8): 1-12.

[8] Li Y F, Tang H J, Li T, et al. Current-voltage characteristics of planar-type InGaAs infrared detectors[J]. Journal of Optoelectronics · Laser, 2009, 20(12): 1580-1583.

[9] Zhou Yi, Chen Jianxin, Xu Qingqing, et al. Dark current analysis of long wavelength InAs/GaSb superlattice infrared detector[C]//SPIE, 2012, 8419(4): 1-7.

李平, 李淘, 邓双燕, 李雪, 邵秀梅, 唐恒敬, 龚海梅. 不同退火处理的台面型In0.83Ga0.17As pin光电二极管暗电流分析[J]. 红外与激光工程, 2016, 45(5): 0520002. Li Ping, Li Tao, Deng Shuangyan, Li Xue, Shao Xiumei, Tang Hengjing, Gong Haimei. Dark current analysis of mesa type In0.83Ga0.17As p-i-n photodiodes with different annealing treatment[J]. Infrared and Laser Engineering, 2016, 45(5): 0520002.

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