[1] 艾克聪. 微光夜视技术的进展与展望[J]. 应用光学, 2006, 27(4): 303-307.

    Ai Kecong. Development and prospect of low-light-level(LLL) night vision technology[J]. Applied Optics, 2006, 27(4): 303-307. (in Chinese)

[2] Estrera Joseph P, Bender E J, Adriana Giordana, et al. Long lifetime generation Ⅳ image intensifier with unfilmed microchannel plate[C]//SPIE, 2000, 4128: 46-53.

[3] 向嵘, 王国政, 陈立, 等. Si基体二维深通道微孔阵列刻蚀技术[J]. 微纳电子技术, 2008, 45(12): 729-733.

    Xiang Rong, Wang Guozheng, Chen Li, et al. Etching technology of Si-based two dimension deep microchannel array[J]. Micronanoelectronic Technology, 2008, 45(12): 729-733. (in Chinese)

[4] 郭艳玲. 先进技术微通道板连续打拿极的研究[D]. 长春: 长春理工大学, 2006.

    Guo Yanling. Continuous dynode of advanced technology microchannel plate research [D]. Changchun: Changchun University of Science and Technology, 2006. (in Chinese)

[5] Seidel H, Csepregi L, Heuberger A. Anisotropic etching of crystalline silicon in alkaline solutions[J]. Electrochem Soc, 1990, 1137: 3612-3626.

[6] 王国政, 李野, 高延军, 等. 硅微通道板像增强器的研究[J]. 电子器件, 2008, 31(1): 308-311.

    Wang Guozheng, Li Ye, Gao Yanjun, et al. Study on Silicon microchannel plate image intensifier[J]. Chinese Journal of Electron Devices, 2008, 31(1): 308-311. (in Chinese)

[7] 付玉霞, 刘志弘, 刘荣华, 等. 铝-RIE刻蚀工艺[J].半导体情报, 2000, 37(5): 37-40.

    Fu Yuxia, Liu Zhihong, Liu Ronghua, et al. Process of Al-reactive Ion etching[J]. Semiconductor Information, 2000, 37(5): 37-40. (in Chinese)

[8] 林丙涛, 唐光庆, 周倩. ST-石英的湿法腐蚀工艺研究[J]. 压电与声光, 2014, 36(5): 779-781.

    Lin Bingtao, Tang Guangqing, Zhou Qian. Study on wet etching process of ST-cut quartz[J]. Piezoelectrics and Acoustooptics, 2014, 36(5): 779-781. (in Chinese)

[9] 崔铮. 微纳米加工技术及其应用[M]. 北京: 高等教育出版社, 2013: 364-365.

    Cui Zheng. Micro-Nanofabrication Technologies and Applications[M]. Beijing: Higher Education Press, 2013: 364-365. (in Chinese)

[10] 苑伟政, 乔大勇. 微机电系统[M]. 西安： 西北工业大学出版社, 2011: 81-82.

    Yuan Weizheng, Qiao Dayong. Microelectromechanical System[M]. Xi′an: Northwestern Polytechnical University Press, 2011: 81-82. (in Chinese)