光子学报, 2018, 47 (12): 1214003, 网络出版: 2019-01-10
离子束刻蚀辅助飞秒激光加工制备碳化硅微光学元件
Ion Beam Etching Assisted Femtosecond Laser Machining to Manufacture Silicon Carbide Micro-optical Components
引用该论文
于磊, 杨双宁, 刘学青, 李德辉. 离子束刻蚀辅助飞秒激光加工制备碳化硅微光学元件[J]. 光子学报, 2018, 47(12): 1214003.
YU Lei, YANG Shuang-ning, LIU Xue-qing, LI De-hui. Ion Beam Etching Assisted Femtosecond Laser Machining to Manufacture Silicon Carbide Micro-optical Components[J]. ACTA PHOTONICA SINICA, 2018, 47(12): 1214003.
于磊, 杨双宁, 刘学青, 李德辉. 离子束刻蚀辅助飞秒激光加工制备碳化硅微光学元件[J]. 光子学报, 2018, 47(12): 1214003. YU Lei, YANG Shuang-ning, LIU Xue-qing, LI De-hui. Ion Beam Etching Assisted Femtosecond Laser Machining to Manufacture Silicon Carbide Micro-optical Components[J]. ACTA PHOTONICA SINICA, 2018, 47(12): 1214003.
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