离子束刻蚀辅助飞秒激光加工制备碳化硅微光学元件
于磊, 杨双宁, 刘学青, 李德辉. 离子束刻蚀辅助飞秒激光加工制备碳化硅微光学元件[J]. 光子学报, 2018, 47(12): 1214003.
YU Lei, YANG Shuang-ning, LIU Xue-qing, LI De-hui. Ion Beam Etching Assisted Femtosecond Laser Machining to Manufacture Silicon Carbide Micro-optical Components[J]. ACTA PHOTONICA SINICA, 2018, 47(12): 1214003.
[1] PECHOLT B, GUPTA S, MOLIAN P. Review of laser microscale processing of silicon carbide［J］. Journal of Laser Applications, 2011, 23(1): 012008.
[2] ZHAO De-sheng, LIU Ran, FU Kai, et al. An Al0.25Ga0.75N/GaN lateral field emission device with a nano void channel［J］. Chinese Physics Letters, 2018(3): 114-117.
[3] RAPE A, LIU X, KULKARNI A, et al. Alloy development for highly conductive thermal management materials using copper-diamond composites fabricated by field assisted sintering technology［J］. Journal of Materials Science, 2013, 48(3): 1262-1267.
[4] CHEN Shuo, LUNA L E, YOU Zheng, et al. Ni-induced graphitization for enhanced long-term stability of ohmic contact to polycrystalline 3C-SiC［J］. Journal of Vacuum Science & Technology A Vacuum Surfaces & Films, 2015, 33(3): 031507.
[5] LU Xi-yuan, LEE J Y, FENG P X, et al. Silicon carbide microdisk resonator［J］. Optics Letters, 2013, 38(8): 1304.
[6] MASSOUBRE D, WANG Li, HOLD L, et al. Vertically conductive single-crystal SiC-based Bragg reflector grown on Si wafer［J］. Scientific Reports, 2015, 5: 17026.
[7] LIM H, RYU J, KIM G, et al. Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds.［J］. Lab on A Chip, 2013, 13(16): 3188-3191.
[8] KRAVCHENKO A, SHEVCHENKO A, GRAHN P, et al. Photolithographic periodic patterning of gold using azobenzene-functionalized polymers［J］. Thin Solid Films, 2013, 540(4): 162-167.
[9] 刘鑫,张满,庞辉,等.基于纳米压印的大角度衍射光学元件批量化制备方法［J］.光子学报,2016,45(6): 0605001.
[10] PEA M, MUSSI V, BARUCCA G, et al. Focused ion beam surface treatments of single crystal zinc oxide for device fabrication［J］. Materials & Design, 2016, 112: 530-538.
[11] BISHOP J, FRONZI M, ELBADAWI C, et al. Deterministic nanopatterning of diamond using electron beams［J］. Acs Nano, 2018, 12(3): 2873-2882.
[12] YONG M K, CHOI K C. Distortion analysis of periodic ring patterns fabrication using surface plasmon interference lithography with an Al hexagonal grating structure on glass［J］. IEEE Transactions on Nanotechnology, 2018, 17(3): 432-436.
[13] 吴易明,李明,程光华.飞秒激光制造微型光纤法布里-珀罗干涉传感器［J］.光子学报,2010,39(4): 584-587.
[14] BULUSHEV E, BESSMELTSEV V, DOSTOVALOV A, et al. High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser［J］. Optics & Lasers in Engineering, 2016, 79: 39-47.
[15] LIU Xue-qing, CHEN Qi-dai, GUAN Kai-min, et al. Dry-etching-assisted femtosecond laser machining［J］. Laser & Photonics Reviews, 2017, 11(3): 1600115.
[16] LIU Xue-qing, YU Lei, CHEN Qi-dai, et al. Mask-free construction of three-dimensional silicon structures by dry etching assisted gray-scale femtosecond laser direct writing［J］. Applied Physics Letters, 2017, 110(9): 091602.
[17] 苏志伟,陈庆川,冯春堂,等.K9玻璃的离子束抛光［C］.2006全国荷电粒子源、粒子束学术会议,2006: 132-133.
SU Zhi-wei, CHEN Qing-chuan, FENG Chun-tang, et al. Ion beam polishing of K9 glass［C］. 2006 National Conference on Charged Particle Sources and Beams, 2006: 132-133.
于磊, 杨双宁, 刘学青, 李德辉. 离子束刻蚀辅助飞秒激光加工制备碳化硅微光学元件[J]. 光子学报, 2018, 47(12): 1214003. YU Lei, YANG Shuang-ning, LIU Xue-qing, LI De-hui. Ion Beam Etching Assisted Femtosecond Laser Machining to Manufacture Silicon Carbide Micro-optical Components[J]. ACTA PHOTONICA SINICA, 2018, 47(12): 1214003.
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