激光斜入射角度对衍射对刀精度的影响

石广丰; 张玉石; 王金雨; 史国权

doi:doi:10.16818/j.issn1001-5868.2018.01.021

半导体光电, 2018, 39 (1): 100, 网络出版: 2018-08-30

激光斜入射角度对衍射对刀精度的影响

Influence of Laser Oblique Incidence Angle on the Accuracy of Diffraction Tool Setting

论文大纲

石广丰 ^*张玉石王金雨史国权

作者单位

长春理工大学机电工程学院, 长春 130022

激光衍射对刀间隙激光斜入射倾斜角度 laser diffraction tool-workpiece distance tool setting accuracy oblique incident

摘要

激光衍射对刀是通过检测激光衍射条纹峰值点间距来进行对刀间隙测量的方法。但是检测装置中装夹误差的存在会使得入射激光相对于成像光轴呈现斜入射状态, 进而对对刀间隙检查结果及对刀精度产生影响。为了研究斜入射角度对衍射对刀精度的影响规律, 建立了激光斜入射的衍射光强计算模型和峰值点间距误差的计算模型, 进而给出了激光斜入射角度计算模型; 理论结合实验分别提出了通过检测中央衍射条纹光强峰值点位置和两个一级衍射条纹峰值点间距综合进行激光斜入射角度校正的方法; 根据具体实验工艺条件, 确定了入射激光的最佳倾斜角度工艺调整范围, 为有效提高激光衍射对刀精度提供了依据。

Abstract

The laser diffraction tool setting is a method for measuring the tool-workpiece distance by detecting the peak-point spacing of the laser diffraction fringes. Due to the existence of clamping errors of the detecting devices, the laser exhibits an oblique incidence state relative to the ideal optical axis, which will affect on the measuring accuracy of the tool-workpiece distance. In order to study the effect laws of the oblique incidence angle on the tool setting accuracy by laser diffraction, a computation model for the diffraction optical intensity and a computation model for the peak-points spacing were established. Then the laser oblique incidence angle was also given. Furthermore, a correction model of the laser inclination angle was comprehensively proposed experimentally and theoretically by measuring the peak-point position of the central diffraction fringe and the two peak points spacing of the first-order diffraction fringes. Finally, the best adjusting range of the inclination angle was confirmed based on the experimental conditions.

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石广丰, 张玉石, 王金雨, 史国权. 激光斜入射角度对衍射对刀精度的影响[J]. 半导体光电, 2018, 39(1): 100. SHI Guangfeng, ZHANG Yushi, WANG Jinyu, SHI Guoquan. Influence of Laser Oblique Incidence Angle on the Accuracy of Diffraction Tool Setting[J]. Semiconductor Optoelectronics, 2018, 39(1): 100.

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