光学 精密工程, 2012, 20 (2): 344, 网络出版: 2012-03-06  

静电拉伸薄膜反射镜的多电极成形控制

Surface shape control of electrostatic stretching membrane mirror by multi-electrodes
张鹏 1,2,*金光 1张元 1钟兴 1
作者单位
1 中国科学院 长春光学精密机械与物理研究所,吉林 长春 130033
2 中国科学院 研究生院,北京 100039
引用该论文

张鹏, 金光, 张元, 钟兴. 静电拉伸薄膜反射镜的多电极成形控制[J]. 光学 精密工程, 2012, 20(2): 344.

ZHANG Peng, JIN Guang, ZHANG Yuan, ZHONG Xing. Surface shape control of electrostatic stretching membrane mirror by multi-electrodes[J]. Optics and Precision Engineering, 2012, 20(2): 344.

参考文献

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张鹏, 金光, 张元, 钟兴. 静电拉伸薄膜反射镜的多电极成形控制[J]. 光学 精密工程, 2012, 20(2): 344. ZHANG Peng, JIN Guang, ZHANG Yuan, ZHONG Xing. Surface shape control of electrostatic stretching membrane mirror by multi-electrodes[J]. Optics and Precision Engineering, 2012, 20(2): 344.

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