光学 精密工程, 2012, 20 (2): 344, 网络出版: 2012-03-06
静电拉伸薄膜反射镜的多电极成形控制
Surface shape control of electrostatic stretching membrane mirror by multi-electrodes
补充材料
张鹏, 金光, 张元, 钟兴. 静电拉伸薄膜反射镜的多电极成形控制[J]. 光学 精密工程, 2012, 20(2): 344. ZHANG Peng, JIN Guang, ZHANG Yuan, ZHONG Xing. Surface shape control of electrostatic stretching membrane mirror by multi-electrodes[J]. Optics and Precision Engineering, 2012, 20(2): 344.