激光剥离Al2O3/GaN中GaN材料温度场的模拟
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王婷, 郭霞, 刘斌, 沈光地. 激光剥离Al2O3/GaN中GaN材料温度场的模拟[J]. 光电工程, 2006, 33(3): 101. 王婷, 郭霞, 刘斌, 沈光地. Temperature field simulation of GaN material during Al2O3/GaN laser lift-off[J]. Opto-Electronic Engineering, 2006, 33(3): 101.
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