光学学报, 2008, 28 (9): 1730, 网络出版: 2008-09-09
离焦激光直写的线宽稳定方法
Research of Linewidth Stabilizing Method During Defocusing Laser Direct Writing
补充材料
金占雷, 谭久彬, 张山, 王雷. 离焦激光直写的线宽稳定方法[J]. 光学学报, 2008, 28(9): 1730. Jin Zhanlei, Tan Jiubin, Zhang Shan, Wang Lei. Research of Linewidth Stabilizing Method During Defocusing Laser Direct Writing[J]. Acta Optica Sinica, 2008, 28(9): 1730.