预制层溅射气压对CIGS薄膜结构及器件的影响
[1] Wang Y C, Shieh H D. Double-graded bandgap in Cu(In,Ga)Se2 thin film solar cells by low toxicity selenization process ［J］. Appl. Phys. Lett., 2014, 105:073901-1-3.
[3] Liao K H, Su C Y, Ding Y T, et al. Effects of Ga accumulation on the microstructure of Cu(In1-x,Gax)Se2 thin films during selenization ［J］. J. Alloys Compd., 2013, 581:250-256.
[4] Marudachalam M, Birkmire R W, Hichri H, et al. Phases, morphology, and diffusion in CuInxGa1-xSe2 thin films ［J］. J. Appl. Phys., 1997, 82(6):2896-2905.
[5] Niki S, Contreras M, Repins I, et al. CIGS absorbers and processes ［J］. Prog. Photovolt.: Res. Appl., 2010, 18(6):453-466.
[6] Li Z H, Cho E S, Kwon S J. Crystal growth of Cu(In,Ga)Se2 film by RTP annealing of the stacked elemental layers formed by E-beam evaporation ［J］. J. Cryst. Growth, 2014, 387:117-123.
[7] Lin Y C, Yao X J, Wang L C, et al. Improving simultaneous of crystallization and Ga homogenization in Cu(In,Ga)Se2 film using an evaporated In film ［J］. J. Alloys Compd., 2013, 572:31-36.
[8] Thornton J A. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings ［J］. J. Vac. Sci. Technol., 1974, 11(4):666-670.
[9] Adurodija F O, Kim S K, Kim S D, et al. Characterization of co-sputtered Cu-In alloy precursors for CuInSe2 thin flms fabrication by close-spaced selenization ［J］. Sol. Energy Mater. Sol. Cell, 1998, 55:225-236.
[10] Chen J S, Kolawa E, Nicolet M A. Cu/In deposited at room temperature: Morphology, phases and reaction ［J］. Solar Cells, 1991, 30:451-458.
[11] Li Z H, Cho E S, Kwon S J. Selenization annealing effect of DC-sputtered metallic precursors using the rapid thermal process for Cu(In,Ga)Se2 thin film solar cells ［J］. Thin Solid Films, 2013, 547:156-162.
[12] Fontanee X, Izquierdo-Roca, Calvo-Barrio V, et al. Investigation of compositional inhomogeneities in complex polycrystalline Cu(In,Ga)Se2 layers for solar cells ［J］. Appl. Phys. Lett., 2009, 95(26):261912-1-3.
[13] Minceva-Sukarova B, Najdoski M, Grozdanov I, et al. Raman spectra of thin solid films of some metal sulfides ［J］. J. Mol. Struc., 1997, 410-411:267-270.
[14] Ishizuka S, Yamada A, Fons P, et al. Texture and morphology variations in (In,Ga)2Se3 and Cu(In,Ga)Se2 thin films grown with various Se source conditions ［J］. Prog. Photovolt.: Res. Appl., 2013, 21:44-53.
[15] Cahen D, Noufi R. Free energy and enthalpies of possible gas phase and surface reactions for preparation of CuInSe2 ［J］. J. Phys. Chem. Solid, 1991, 52:947-961.
[16] Lundberg O, Edoff M, Stolt L. The effect of Ga-grading in CIGS thin film solar cells ［J］. Thin Solid Films, 2005, 480-481:520-525.
李光旻, 刘玮, 林舒平, 李晓东, 周志强, 何青, 张毅, 刘芳芳, 孙云. 预制层溅射气压对CIGS薄膜结构及器件的影响[J]. 发光学报, 2015, 36(2): 192. LI Guang-min, LIU Wei, LIN Shu-ping, LI Xiao-dong, ZHOU Zhi-qiang, HE Qing, ZHANG Yi, LIU Fang-fang, SUN Yun. Influence of Sputtering Pressure on The Structure and Device Properties of CIGS Thin Films[J]. Chinese Journal of Luminescence, 2015, 36(2): 192.
PDF全文
