红外与激光工程, 2018, 47 (6): 0618002, 网络出版: 2018-09-08   

浸没式光刻照明系统的照明模式变换器

Light mode converter in immersion lithography lighting system
李美萱 1,2,3,*董连和 3
作者单位
1 吉林工程技术师范学院 量子信息技术交叉学科研究院, 吉林 长春 130052
2 吉林省量子信息技术工程实验室, 吉林 长春 130052
3 长春理工大学,吉林 长春 130000
引用该论文

李美萱, 董连和. 浸没式光刻照明系统的照明模式变换器[J]. 红外与激光工程, 2018, 47(6): 0618002.

Li Meixuan, Dong Lianhe. Light mode converter in immersion lithography lighting system[J]. Infrared and Laser Engineering, 2018, 47(6): 0618002.

参考文献

[1] Dorodnyy A, Shklover V, Braginsky L, et al. High-efficiency spectrum splitting for solar photovoltaic[J]. Solar Energy Materials &Solar Cells, 2015, 136(10): 120-126.

[2] Zhang L, Liu D, Shi T, et al. Practical and accurate method for aspheric misalignment aberrations calibration in non-null interferometer testing[J]. Applied Optics, 2013, 52(35): 8501-8511.

[3] Zhang Wei, Gong Yan. Design of diffractive optical elements for off-axis illumination in projection lithography[J]. Opt Precision Eng, 2008, 16(11): 2081-2086. (in Chinese)

[4] Song Qiang, Zhu Jing, Wang Jian. A mixed gradient algorithm for high performance DOE design in off axis lithography illumination system[J]. Acta Optica Sinica, 2015, 35(1): 0122005. (in Chinese)

[5] Zhang Wei, Liang Chuanyang, Li Jin, et al. Design of optical elements for beam shaping and unigorm illumination in laser digital projection display system[J]. Acta Optica Sinica, 2015, 35(1): 0805001. (in Chinese)

[6] Zhao Yang, Gong Yan. Design of beam shaping unit for deep ultraviolet lithographic illumination system [J]. Opt Precision Eng, 2011, 19(1): 29-34. (in Chinese)

[7] Bao Haiting, Ouyang Mingzhao, Wang Zhiyong, et al. Design of light field shaping system based on DOE identification[J]. Journal of Changchun University of Science and Technology, 2017, 40(2): 27-32. (in Chinese)

[8] Uzu H, Ichikawa M, Hino M, et al. High efficiency solar cells combining a perovskite and a silicon heterojunction solar cells visa an optical splitting system[J]. Appl Phys Lett, 2015, 106(1): 013506.

[9] Zhang Jian, Li Mengjuan, Yin Ganghua, et al. Large-diameter membrane Fresnel diffraction elements for space telescope[J]. Optics and Precision Engineering, 2016, 24(6):1289-1296. (in Chinese)

[10] Zhang Wei, Gong Yan. Vector analysis of diffractive optical elements for off axis illumination of projection lithographic system[J]. Acta Optical Sinica, 2011, 31(10): 1005002. (in Chinese)

[11] Cui Qingfeng, Gao Shiping, Kuang Yuguang. Design, fabrication and experiment of a hybrid diffractive refractive binary optical system[J]. Optics and Precision Engineering,1997, 5(5): 17-20. (in Chinese)

[12] Yan Shuhua. Design of Diffractive Mmicro-optics[M]. Beijing: National Defence Industry Press, 2011: 66-76. (in Chinese)

李美萱, 董连和. 浸没式光刻照明系统的照明模式变换器[J]. 红外与激光工程, 2018, 47(6): 0618002. Li Meixuan, Dong Lianhe. Light mode converter in immersion lithography lighting system[J]. Infrared and Laser Engineering, 2018, 47(6): 0618002.

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