Danlu Liu 1Ming Li 1Tang Xu 1Jie Dong 1[ ... ]Yue Xu 1,2,*
Author Affiliations
Abstract
1 College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
2 National and Local Joint Engineering Laboratory of RF Integration & Micro-Assembly Technology, Nanjing 210023, China
The influence of the virtual guard ring width (GRW) on the performance of the p-well/deep n-well single-photon avalanche diode (SPAD) in a 180 nm standard CMOS process was investigated. TCAD simulation demonstrates that the electric field strength and current density in the guard ring are obviously enhanced when GRW is decreased to 1 μm. It is experimentally found that, compared with an SPAD with GRW = 2 μm, the dark count rate (DCR) and afterpulsing probability (AP) of the SPAD with GRW = 1 μm is significantly increased by 2.7 times and twofold, respectively, meanwhile, its photon detection probability (PDP) is saturated and hard to be promoted at over 2 V excess bias voltage. Although the fill factor (FF) can be enlarged by reducing GRW, the dark noise of devices is negatively affected due to the enhanced trap-assisted tunneling (TAT) effect in the 1 μm guard ring region. By comparison, the SPAD with GRW = 2 μm can achieve a better trade-off between the FF and noise performance. Our study provides a design guideline for guard rings to realize a low-noise SPAD for large-array applications.
single-photon avalanche diode (SPAD) virtual guard ring dark count rate (DCR) photon detection probability (PDP) afterpulsing probability (AP) 
Journal of Semiconductors
2023, 44(11): 114102
刘长明 1,1,2,2史学舜 1,1,2,2,*张鹏举 1,1,2,2庄新港 1,1,2,2刘红博 1,1,2,2
作者单位
摘要
1 中国电子科技集团公司第四十一研究所, 山东 青岛 266555
2 国防科技工业光电子一级计量站, 山东 青岛 266555
针对硅单光子雪崩探测器探测效率高准确度测量的需要,建立了一套溯源至标准探测器的硅单光子探测器探测效率测量装置.首先通过大动态范围高精度衰减产生光子数已知的准单光子源来校准探测器的探测效率,其次对影响探测效率测量的后脉冲概率和死时间进行了分析与测量,最后系统分析了各测量不确定度的来源,实现了硅单光子雪崩探测器在632.8nm波长处探测效率测量不确定度达到0.6%(k=2).该装置采用超连续谱光源与单色仪组合输出单色光源,结合标准探测器,可根据需要实现硅单光子雪崩探测器宽波段内的探测效率自动化测量.
硅单光子雪崩探测器 探测效率 后脉冲 死时间 标准探测器 Silicon single-photon avalanche detector Detection efficiency Afterpulsing Dead time Standard detector 
光子学报
2019, 48(12): 1248006
作者单位
摘要
重庆光电技术研究所, 重庆 400060
基于吸收区倍增区分置(SAM)结构研制了一种用于单光子探测的平面型InGaAs/InP盖革模式雪崩光电二极管(APD).着重讨论了边缘击穿抑制效果对器件暗计数率、单光子探测效率,以及后脉冲概率等主要盖革模式性能参数的影响,并对其原因进行了探讨与分析.研究结果表明,有效抑制边缘击穿是获得高性能InGaAs/InP平面型盖革模式雪崩光电二极管的关键因素之一,受边缘击穿抑制效果影响,探测效率随过偏压增速缓慢,而当过偏压达到一定值时,暗计数率与后脉冲概率成倍增加.
盖革模式 边缘击穿抑制 暗计数率 探测效率 后脉冲概率 过偏压 Geiger mode SAM SAM edge breakdown suppression dark count rate single photon detection efficiency afterpulsing overbias 
半导体光电
2015, 36(3): 361

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