1 北京控制工程研究所，北京 100190
2 北京双工精密机械有限公司，北京 100096
以聚焦型X射线反射镜的镍磷合金芯模为研究对象, 研究了单点金刚石超精密车削的切削深度、主轴转速、进给量等工艺参数对表面粗糙度的影响关系。结果表明，进给量对加工表面粗糙度影响相对最大，主轴转速、切削深度的影响呈弱相关关系。开展了NiP合金超精密车削工艺试验，得到切削深度、主轴转速、进给量的优化工艺参数，并初步建立了表面粗糙度预测模型。在此基础上，对Φ110 mm×140 mm的X射线反射镜镍磷合金芯模进行加工验证，获得了PV61.37~83.47 nm、RMS7.952~10.326 nm、Ra6.379~8.332 nm的表面粗糙度，圆度误差0.39 μm、斜率误差均方根值0.42 μm，满足X射线反射镜对芯模超精密车削需求，为后续大规格X射线反射镜超精密制造奠定了技术基础。
X射线反射镜 芯模 超精密车削 镍磷合金 工艺参数 X-ray mirror mandrel ultra-precision turning NiP alloy process parameters 红外与激光工程
2022, 51(7): 2021G005
Author Affiliations
Abstract
GOLD-Instituto de Fisica Aplicada, CSIC, Serrano 144, 28006 Madrid, Spain
The strong absorption of materials in the extreme ultraviolet (EUV) above ~50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of materials with moderate absorption, such as various lanthanides. Based on this research, novel multilayers based on Yb, Al, and SiO have been developed with a narrowband performance in the 50–92 nm range. Furthermore, procedures for the design of multi-material multilayers with absorbing materials have been derived, which resulted in multilayers with enhanced reflectance.
多层膜 极紫外 X射线反射镜 空间光学 光刻术 230.4170 Multilayers 260.7200 Ultraviolet, extreme 340.7470 X-ray mirrors 350.6090 Space optics 220.3740 Lithography Chinese Optics Letters
2010, 8(s1): 159
