基于超材料的超级透镜能让携带物体高频信息的倏逝波分量参与成像,从而实现对小于半个工作波长的超精细结构的分辨。分析了几种典型的超透镜,如近场、远场和双曲超透镜的工作原理和研究进展,并对超透镜技术在实时生物成像、高密度光存贮、光刻等方面的应用前景进行了分析和总结。
超级透镜 超材料 倏逝波 双曲透镜 超分辨率 superlens metamaterial evanescent wave hyperlens super-resolution
Author Affiliations
Abstract
1 Centre for Optical and Electromagnetic Research, Zhejiang University, Joint Research Center of Photonics of the Royal Institute of Technology and Zhejiang University (JORCEP), Hangzhou 310058
2 The Institute of Information Optical Engineering, Soochow University, Suzhou 215006
This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.
光刻技术 银膜超级透镜 PMMA 220.3740 Lithography 080.3630 Lenses Chinese Optics Letters
2008, 6(2): 02149
