作者单位
摘要
上海理工大学 光电信息与计算机工程学院,上海 200093
超透镜是基于超表面对光场调控的成像器件,由于其具有体积小型化、工艺流程化的优势,在器件轻量化、便携性方面具有很好的应用前景。针对当前市场对透镜的体积需求,使用时域有限差分法模拟了一种新型结构的超透镜,它是基于光子晶体的平板超透镜,尺寸为长2 μm,宽1 μm,工作波长在717 nm可见光波段。该平板超透镜以TiO2波导作为衬底,由Au和GaP两组周期相同的光子晶体呈相切的结构共同蚀刻在TiO2波导上,模拟研究透镜成像效果。此外通过引入一系列不同形状的缺陷,研究其对平板透镜成像结果的影响,结果表明,当缺陷结构为矩形尺寸:Lx = 0.5 μm,Ly = 0.8 μm时,该平板超透镜呈现出最好的成像效果,达到了0.556 λ数值的超分辨,极大地提高了成像质量。未来该平板超透镜在可便携的成像设备,AR,VR以及小型医疗设备等各个领域具有极大的发展潜力。
超透镜 时域有限差分法 超分辨 光子晶体 衍射极限 superlens finite-difference time-domain method super resolution photonic crystal diffraction limit 
光学仪器
2023, 45(6): 33
Author Affiliations
Abstract
1 National Laboratory of Solid State Microstructures, Key Laboratory of Intelligent Optical Sensing and Manipulation, Jiangsu Key Laboratory of Artificial Functional Materials, College of Engineering and Applied Sciences, School of Physics, Nanjing University, Nanjing, China
2 National Mobile Communications Research Laboratory, School of Information Science and Engineering, Frontiers Science Center for Mobile Information Communication and Security, Southeast University, Nanjing, China
The refractive-lens technique has been well developed over a long period of evolution, offering powerful imaging functionalities, such as microscopes, telescopes, and spectroscopes. Nevertheless, the ever-growing requirements continue to urge further enhanced imaging capabilities and upgraded devices that are more compact for convenience. Metamaterial as a fascinating concept has inspired unprecedented new explorations in physics, material science, and optics, not only in fundamental researches but also novel applications. Along with the imaging topic, this paper reviews the progress of the flat lens as an important branch of metamaterials, covering the early superlens with super-diffraction capability and current hot topics of metalenses including a paralleled strategy of multilevel diffractive lenses. Numerous efforts and approaches have been dedicated to areas ranging from the new fascinating physics to feasible applications. This review provides a clear picture of the flat-lens evolution from the perspective of metamaterial design, elucidating the relation and comparison between a superlens and metalens, and addressing derivative designs. Finally, application scenarios that favor the ultrathin lens technique are emphasized with respect to possible revolutionary imaging devices, followed by conclusive remarks and prospects.
optics imaging metamaterial superlens metalens 
Photonics Insights
2023, 2(1): R01
Author Affiliations
Abstract
1 INAOE, Departamento de Óptica, Tonantzintla, Puebla, 72840, Mexico
2 Catedras Conacyt – CICESE, Unidad Monterrey, PIIT Apodaca, Nuevo León, 66629, Mexico
3 Tecnológico de Monterrey, Campus Puebla, Departamento de Bioingeniería y Ciencias, Puebla, Puebla, 72453, Mexico
4 CICESE, Unidad Monterrey, PIIT Apodaca, Nuevo León, 66629, Mexico
In this Letter, a Gabor superlens with variable focus is presented. This configuration uses tunable liquid lenses in the third microlens array of the Gabor superlens. By applying voltage, the radius of curvature of the micro-tunable doublet arrays changes, and the Gabor conditions are fulfilled at different focal planes. As a consequence, the magnification of the image at the focal planes changes, and a zoom effect is observed. The marginal depth plane for this system goes from 0.86 to 0.89 mm. The optical simulation, calculations, and results of the simulated optical system performance are presented.
Gabor superlens micro-tunable lens multi-aperture optics geometric optical design 
Chinese Optics Letters
2020, 18(12): 122201
作者单位
摘要
电子科技大学 光电信息学院, 成都 610054
超透镜光刻技术是一种很有前景的纳米结构成像技术, 由于其具有可以克服衍射极限的能力, 直到2005年, 张翔和他的同事在365 nm紫外线波长下成功的对一排纳米线和刻在高分子膜上的四个字母“NANO”实现了超分辨成像, 分辨率高达1/6入射波长。通过传递矩阵方法优化出超透镜结构, 并通过选择适当的材料和设计在超透镜结构中的每个层的厚度以及合理的优化实验等方法制备一个新的超透镜结构, 利用这种超透镜结构实现了周期性纳米结构及孤立纳米结构的亚波长成像。实验结果表明, 对于周期性的纳米结构, 其图像分辨率达到100 nm, 而孤立结构的分辨率低于50 nm, 小于入射波长的1/7。
超透镜光刻 亚波长成像 周期性结构 孤立结构 superlens nanolithography subwavelength imaging periodic structures isolated structures 
强激光与粒子束
2015, 27(2): 024131
作者单位
摘要
1 乐山师范学院物理与电子工程学院, 四川 乐山 614004
2 四川大学物理科学与技术学院纳光子技术研究所, 四川 成都 610064
利用表面等离子体激元(SPP)的局域能量增强效应可提高现有光学光刻的分辨率。背向曝光SPP干涉光刻技术可以大面积制备低成本的纳米周期性结构。理论分析了SPP在背向曝光系统中的共振透射特性,提出了背向曝光SPP干涉光刻系统核心元件银层超透镜的优化设计方法,并利用时域有限差分法和理论解析式模拟计算了背向曝光SPP干涉光场分布,通过优化设计银层超透镜厚度和共振角,实验获得了较好的周期性光刻线条。
表面光学 表面等离波子激元干涉光刻 背向曝光 银层超透镜 
光学学报
2011, 31(12): 1222007
作者单位
摘要
1 中国科学院光电技术研究所 微细加工光学技术国家重点实验室,成都 610209
2 中国科学院研究生院,北京 100049
本文提出和研究了利用超分辨缩小成像平板超透镜,在i 线光源波长下实现纳米尺度光刻方法。为了在超分辨透镜像面位置获得高质量的光刻图形,采用超分辨透镜-光刻胶-反射银膜的结构方式,解决由于超透镜磁场偏振传输模式带来的成像光场畸变问题,大大提高了成像质量和光场对比度。采用掩模图形结构预补偿的方法,消除超分辨透镜的倍率畸变像差影响。基于有限元电磁计算方法,数值模拟结果验证了该方法在i 线光源波长下实现纳米尺度缩小成像光刻的可能性。在i 线(365 nm)光源波长下,得到约35 nm 线宽的高对比成像光场模拟结果,并分析了结构参数变化对成像光场带来的影响。
纳米光刻 超分辨成像 表面等离子体 超透镜 nanolithography sub-wavelength resolution imaging surface plasmons superlens 
光电工程
2011, 38(5): 35
作者单位
摘要
武汉大学电子信息学院, 湖北 武汉 430079
基于超材料的超级透镜能让携带物体高频信息的倏逝波分量参与成像,从而实现对小于半个工作波长的超精细结构的分辨。分析了几种典型的超透镜,如近场、远场和双曲超透镜的工作原理和研究进展,并对超透镜技术在实时生物成像、高密度光存贮、光刻等方面的应用前景进行了分析和总结。
超级透镜 超材料 倏逝波 双曲透镜 超分辨率 superlens metamaterial evanescent wave hyperlens super-resolution 
光学与光电技术
2010, 8(5): 89
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, PO Box 800-211, Shanghai 201800, People’s Republic of China
2 School of Computer and Communication, Hunan University, Changsha 410082, People’s Republic of China
3 Department of Optical Science and Engineering, Fudan University, Shanghai 200433, People’s Republic of China
In contrast to previous two-dimensional coated photonic crystals, in this paper we propose a left-handed one that is made of dielectric tubes arranged in a close-packed hexagonal lattice. Without metallic cores, this structure is low-loss and convenient to fabricate. Negative refraction and its resulting focusing are investigated by dispersion characteristic analysis and numerical simulation of the field pattern. With proper modification at the interface, the image is improved. With better isotropy than that with noncircular rods, planoconcave lenses made by dielectric tubes focus a Gaussian beam exactly at R/|n?1|.
left-handed materials photonic crystal superlens 
Collection Of theses on high power laser and plasma physics
2006, 4(1): 86

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