半导体光电, 2012, 33 (4): 500, 网络出版: 2012-09-04
磁控溅射纳米VO2(B相)热敏薄膜的制备
Preparation and Characterization of Thermal Sensitive VO2(B Phase) Films by Magnetron Sputtering
基本信息
| DOI: | -- |
| 中图分类号: | TN213 |
| 栏目: | |
| 项目基金: | 创新研究群体科学基金项目(61021061) |
| 收稿日期: | 2012-03-12 |
| 修改稿日期: | -- |
| 网络出版日期: | 2012-09-04 |
| 通讯作者: | 何少伟 (shawn_hoe@163.com) |
| 备注: | -- |
何少伟, 陈鹏杰, 胡庆, 董翔, 蒋亚东, 赖建军, 王宏臣, 黄光. 磁控溅射纳米VO2(B相)热敏薄膜的制备[J]. 半导体光电, 2012, 33(4): 500. HE Shaowei, CHEN Pengjie, HU Qing, DONG Xiang, JIANG Yadong, LAI Jianjun, WANG Hongchen, HUANG Guang. Preparation and Characterization of Thermal Sensitive VO2(B Phase) Films by Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2012, 33(4): 500.
PDF全文
