磁控溅射纳米VO2(B相)热敏薄膜的制备
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何少伟, 陈鹏杰, 胡庆, 董翔, 蒋亚东, 赖建军, 王宏臣, 黄光. 磁控溅射纳米VO2(B相)热敏薄膜的制备[J]. 半导体光电, 2012, 33(4): 500. HE Shaowei, CHEN Pengjie, HU Qing, DONG Xiang, JIANG Yadong, LAI Jianjun, WANG Hongchen, HUANG Guang. Preparation and Characterization of Thermal Sensitive VO2(B Phase) Films by Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2012, 33(4): 500.
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