半导体光电, 2012, 33 (4): 500, 网络出版: 2012-09-04
磁控溅射纳米VO2(B相)热敏薄膜的制备
Preparation and Characterization of Thermal Sensitive VO2(B Phase) Films by Magnetron Sputtering
图 & 表
何少伟, 陈鹏杰, 胡庆, 董翔, 蒋亚东, 赖建军, 王宏臣, 黄光. 磁控溅射纳米VO2(B相)热敏薄膜的制备[J]. 半导体光电, 2012, 33(4): 500. HE Shaowei, CHEN Pengjie, HU Qing, DONG Xiang, JIANG Yadong, LAI Jianjun, WANG Hongchen, HUANG Guang. Preparation and Characterization of Thermal Sensitive VO2(B Phase) Films by Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2012, 33(4): 500.