磁控溅射纳米VO2(B相)热敏薄膜的制备
何少伟, 陈鹏杰, 胡庆, 董翔, 蒋亚东, 赖建军, 王宏臣, 黄光. 磁控溅射纳米VO2(B相)热敏薄膜的制备[J]. 半导体光电, 2012, 33(4): 500.
HE Shaowei, CHEN Pengjie, HU Qing, DONG Xiang, JIANG Yadong, LAI Jianjun, WANG Hongchen, HUANG Guang. Preparation and Characterization of Thermal Sensitive VO2(B Phase) Films by Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2012, 33(4): 500.
[1] Wood R A.A high performance infrared imaging with monolithic silicon focal planes operating at room temperature[C]/ Digest of International Electron Devices Meeting, 1993: 175177.
[2] Tanaka A,Mastsumoto S, Tsukamoto N, et al. Infrared focal plane array incorporating silicon IC process compatible bolometer[J]. IEEE Trans. on Electron. Devices,1996,44(11): 18841850. ［3］Murphy D F,Ray M, Wyles R, et al. High sensitivity(25μm pitch) microbolometer FPAs[J]. Proc. SPIE,2011,4369: 147159.
[3] Hay K A,Deusen D V. Uncooled focal plane array detector development at infrared vision technology corp[J]. Proc.SPIE, 2005,5783: 514523.
[4] Tidrow M Z,Clark W W, Tipton W, et al. Uncooled infrared detectors and focal plane arrays[J], Proc. SPIE, 1998,3553: 178187.
[5] Chen C H,Yi X J, Xiong B F. Infrared responsivity of uncooled VO2based thin films bolometer[J]. Acta Phys.Sin.,2001,50(3): 450452.
[6] Kumar R T R,Karunagaran B, Mangalaraj D, et al. Study of a pulsed laser deposited vanadium oxide based microbolometer array[J]. Smart Mater. Struct., 2003,12(2): 188.
[7] Sedky S,Fiorini P, Baert K, et al. Characterization and optimization of infrared SiGe bolometers[J]. IEEE Trans.on Electron. Devices,1999,46(4): 675682.
[8] Almasri M,Butler D P, ElikButler Z C. Selfsupporting uncooled infrared microbolometers with lowthermal mass[J]. J. Microelectromech. System,2001,10(3): 469476.
[9] Tsang C,Manthiram A. Synthesis of nanocrystalline VO2 and Its Electrochemical Behavior in Lithium Batteries[J]. J. Electrochem. Soc.,1997,144(2): 520524.
何少伟, 陈鹏杰, 胡庆, 董翔, 蒋亚东, 赖建军, 王宏臣, 黄光. 磁控溅射纳米VO2(B相)热敏薄膜的制备[J]. 半导体光电, 2012, 33(4): 500. HE Shaowei, CHEN Pengjie, HU Qing, DONG Xiang, JIANG Yadong, LAI Jianjun, WANG Hongchen, HUANG Guang. Preparation and Characterization of Thermal Sensitive VO2(B Phase) Films by Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2012, 33(4): 500.
PDF全文
