氢退火对LPCVD生长的ZnO薄膜光学和电学性能的影响
李旺, 唐鹿, 杜江萍, 薛飞, 辛增念, 罗哲, 刘石勇. 氢退火对LPCVD生长的ZnO薄膜光学和电学性能的影响[J]. 发光学报, 2016, 37(12): 1496.
LI Wang, TANG Lu, DU Jiang-ping, XUE Fei, XIN Zeng-nian, LUO Zhe, LIU Shi-yong. Effect of Hydrogen Annealing on The Optical and Electrical Properties of ZnO Thin Films Grown by LPCVD[J]. Chinese Journal of Luminescence, 2016, 37(12): 1496.
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李旺, 唐鹿, 杜江萍, 薛飞, 辛增念, 罗哲, 刘石勇. 氢退火对LPCVD生长的ZnO薄膜光学和电学性能的影响[J]. 发光学报, 2016, 37(12): 1496. LI Wang, TANG Lu, DU Jiang-ping, XUE Fei, XIN Zeng-nian, LUO Zhe, LIU Shi-yong. Effect of Hydrogen Annealing on The Optical and Electrical Properties of ZnO Thin Films Grown by LPCVD[J]. Chinese Journal of Luminescence, 2016, 37(12): 1496.