光栅刻划机阿贝误差对光栅衍射波前质量的影响及其校正方法

糜小涛; 于海利; 于宏柱; 齐向东; 李晓天; 万秋华

doi:doi:10.3788/CJL201744.0904001

中国激光, 2017, 44 (9): 0904001, 网络出版: 2017-09-07

光栅刻划机阿贝误差对光栅衍射波前质量的影响及其校正方法下载： 967次

Influence and Revising Method of Grating Ruling Engine′s Abbe Error on Quality of Grating Wavefront

糜小涛 ^1,2,*于海利 ¹于宏柱 ¹齐向东 ¹李晓天 ¹万秋华 ¹

作者单位

¹ 中国科学院长春光学精密机械与物理研究所, 吉林长春 130033

² 中国科学院大学, 北京 100049

引用该论文

糜小涛, 于海利, 于宏柱, 齐向东, 李晓天, 万秋华. 光栅刻划机阿贝误差对光栅衍射波前质量的影响及其校正方法[J]. 中国激光, 2017, 44(9): 0904001.

Mi Xiaotao, Yu Haili, Yu Hongzhu, Qi Xiangdong, Li Xiaotian, Wan Qiuhua. Influence and Revising Method of Grating Ruling Engine′s Abbe Error on Quality of Grating Wavefront[J]. Chinese Journal of Lasers, 2017, 44(9): 0904001.

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糜小涛, 于海利, 于宏柱, 齐向东, 李晓天, 万秋华. 光栅刻划机阿贝误差对光栅衍射波前质量的影响及其校正方法[J]. 中国激光, 2017, 44(9): 0904001. Mi Xiaotao, Yu Haili, Yu Hongzhu, Qi Xiangdong, Li Xiaotian, Wan Qiuhua. Influence and Revising Method of Grating Ruling Engine′s Abbe Error on Quality of Grating Wavefront[J]. Chinese Journal of Lasers, 2017, 44(9): 0904001.

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