光子学报, 2017, 46 (9): 0912008, 网络出版: 2017-10-16   

基于Zernike多项式拟合三平面互检的误差分析

Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting
作者单位
1 西安工业大学 a理学院
2 b计算机科学与工程学院
3 西安工业大学 c光电工程学院,西安 710021
引用该论文

高飞, 李晋惠, 田爱玲, 刘丙才, 李世杰, 岳鑫. 基于Zernike多项式拟合三平面互检的误差分析[J]. 光子学报, 2017, 46(9): 0912008.

GAO Fei, LI Jin-hui, TIAN Ai-ling, LIU Bing-cai, LI Shi-jie, YUE Xin. Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting[J]. ACTA PHOTONICA SINICA, 2017, 46(9): 0912008.

参考文献

[1] 刘永明,谢军,田伟, 等. 基于有限元法的面形反演模型[J].光子学报,2014,43(8):0812001.

    LIU Yong-ming,XIE Jun,TIAN Wei,et al.Inverse modeling of mirror surface figure based on finite element contact analysis[J].Acta Photonica Sinica, 2014,43(8):0812001.

[2] 代雷,隋永新,吴迪. 基于激光干涉法的曲率半径精密检测系统[J].红外与激光工程,2013,42(8):2221-2225.

    DAI Lei, SUI Yong-xin, WU Di. Precision of measuring system of radius of curvature using laser interference method[J].Infrared and Laser Engineering,2013,42(8):2221-2225.

[3] VANNONIM.Absolute flatness measurement using oblique incidence setup and an iterative algorithm[J].Optics Express,2014,22(3): 3538-3546.

[4] 苏东奇,田伟,苗二龙, 等,基于重力补偿的立式三平板绝对检测[J].光子学报,2015,44(11):1112003.

    SU Dong-qi,TIAN Wei,MIAO Er-long,et al. Absolute three-flat test in vertical direction with gravity deformation compensation[J].Acta Photonica Sinica,2015,44(11):1112003.

[5] E Ke-wei, LI Da-hai, ZHANG Chen, et al. Four-step shear method for the absolute measurement of a flat surface based on phase measuring deflectometry[J].Applied Optics,2016,55(30):8419-8425.

[6] SONG Wei-hong,HOU Xi,WU Fan, et al. Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method[J].Applied Optics,2013,24(52):5974-5978.

[7] 韩冬松,何昕,魏仲慧, 等,应用高精度旋转法的干涉仪检测误差校正[J].光学精密工程,2015,23(5):1291-1303.

    HAN Dong-song,HE Xin,WEI Zhong-hui, et al. Error correction of interferometer detection with high-accuracy rotation method[J].Optics and Precision Engineering,2015,23(5):1291-1303.

[8] 苗二龙,张健,谷勇强等,用于光刻投影物镜检测的高精度菲佐干涉仪误差分析[J].中国激光,2010,37(8):2029-2034.

    MIAO Er-long.ZHANG Jian,GU Yong-qiang, et al. Measurement error analysis of high precision fizeau interferometer for lithography projection objective[J].Chinese Journal of Lasers, 2010,37(8):2029-2034.

[9] GRIESMANN U. Three-flat test solutions based on simple mirror symmetry[J].Applied Optics,2006,45(23):5856-5865.

[10] 陈旭,袁文权,冯玉涛等,绝对检验参考镜误差分析与热变形模型建立[J].光学学报,2011,31(2):0212002.

    CHEN Xu,YUAN Wen-quan,FENG Yu-tao, et al. Study of the error of the reference lens in absolute spherical testing and the thermal deformation model establishment[J].Acta Optica Sinica, 2011,31(2):0212002

[11] FUJIMOTO I, TAKATSUJI T, NISHIMURA K, et al. Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface[J].Applied Optics,2012,55(30):8419-8425.

[12] 朱硕. 大口径光学平面镜面形检测技术研究[D]. 北京:中国科学院大学,2014.

    ZHU-Shuo. Study on technology for large optic flat mirror testing[D]. Beijing: Chinese Academy of Science,2014.

[13] SONG Wei-hong,WU Fan,HOU Xi, et al. Absolute measurement of flats with the method of shift-rotation[J].Optical Review,2013,20(5):374-377.

[14] 田爱玲,郑显锋,刘丙才,等,三维面型的绝对测量[J].西安工业大学学报,2012,32(6):431-436.

    TIAN Ai-ling,ZHENG Xian-feng,LIU Bing-cai, et al. Absolute measurement of 3D Surface[J].Journal of Xi′an Technological University, 2012,32(6):431-436.

[15] SCHREINER R, SCHWIDER J, LINDLEIN N,et al. Absolute testing of the reference surface of a Fizeau interferometer through even/odd decompositions[J]. Applied Optics, 2008, 47(32):6134-6141.

[16] YUMOTO H, MATSUYAMA S, MIMURA H, et al. Absolute calibration of optical flats using the three-flat test by considering the relative humidity change[J].Nuclear Inst & Methods in Physics Research A, 2013, 710(3):2-6.

[17] CHATTERJEE S, KUMAR Y P. Measurement of the surface form error of a spherical surface with a wedge phase shifting Fizeau interferometer[J].Journal of Optics, 2013, 42(2):122-127.

[18] 徐洋,唐锋, 王向朝, 等. 平面面形绝对检验技术测量误差分析[J].中国激光,2011,38(10):1008009.

    XU Yang,TANG Feng,WANG Xiang-chao, et al. Measurement error analysis of absolute flatness test[J].Chinese Journal of Lasers, 2011,38(10):1008009.

[19] FRITZ B S. Absolute calibration of an optical flat[J].Optical Engineering, 1984,23(4):379-383.

高飞, 李晋惠, 田爱玲, 刘丙才, 李世杰, 岳鑫. 基于Zernike多项式拟合三平面互检的误差分析[J]. 光子学报, 2017, 46(9): 0912008. GAO Fei, LI Jin-hui, TIAN Ai-ling, LIU Bing-cai, LI Shi-jie, YUE Xin. Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting[J]. ACTA PHOTONICA SINICA, 2017, 46(9): 0912008.

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