光谱学与光谱分析, 2016, 36 (4): 1261, 网络出版: 2016-12-20
定量单轴压力下单晶硅片原位拉曼谱峰测试
In Situ Raman Spectrum Peak Test of Monocrystalline Silicon Wafer under Quantitative Uniaxial Pressure
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谢超, 杜建国, 刘雷, 易丽, 刘红, 陈志, 李静. 定量单轴压力下单晶硅片原位拉曼谱峰测试[J]. 光谱学与光谱分析, 2016, 36(4): 1261. XIE Chao, DU Jian-guo, LIU Lei, YI Li, LIU Hong, CHEN Zhi, LI Jing. In Situ Raman Spectrum Peak Test of Monocrystalline Silicon Wafer under Quantitative Uniaxial Pressure[J]. Spectroscopy and Spectral Analysis, 2016, 36(4): 1261.