傅里叶变换轮廓术中由于坐标混淆而产生的高度测量误差的修正

田苗; 张春林; 权伟龙

doi:doi:10.3788/lop50.061202

激光与光电子学进展, 2013, 50 (6): 061202, 网络出版: 2013-05-29

傅里叶变换轮廓术中由于坐标混淆而产生的高度测量误差的修正

Correction of Height Measurement Error Arised from Coordinate Confusion in FTP

论文大纲

田苗 ^*张春林权伟龙

作者单位

兰州交通大学数理学院, 甘肃兰州 730070

测量傅里叶变换轮廓术高度测量坐标混淆双色条纹 measurement Fourier transform profilometry height measurement coordinate confusion bi-color fringe

摘要

傅里叶变换轮廓术是一种主动投影光栅测量物体表面三维形貌的技术，只需要一幅结构条纹图即可对整个范围进行分析。该方法通过对物体表面投影产生的变形光栅的相位与参考面的变形光栅相位相减，从而得以测量高度分布。但该方法在发散照明光路中所测量高度对应的坐标值只是一个近似，在做精确测量时还需要做理论修正。在理论上阐述了由坐标选取混淆产生的高度测量误差的原因，并对其做了一级修正。在实验上采用红绿双色条纹技术，并结合Matlab软件对误差做了定量分析。

Abstract

Fourier transform profilometry (FTP) is a kind of active technology by projecting a grating on object surface to measure the three-dimensional (3D) shape. It requires only one structured fringe pattern to analyze the entire range of the measurement system. Based on the subtraction of the distortion grating phases of the object surface and the reference surface, FTP can measure the height distribution. But in divergent light path the coordinate of the height is only an approximation, so that in precise measurements we need theoretical correction. We analyzed the cause of the height measurement error introduced by the coordinate confusion, and made the first order correction. In experiment, we used bi-color fringe technology, in combination with the Matlab software, to and successfully carried out a quantitative analysis of the error.

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田苗, 张春林, 权伟龙. 傅里叶变换轮廓术中由于坐标混淆而产生的高度测量误差的修正[J]. 激光与光电子学进展, 2013, 50(6): 061202. Tian Miao, Zhang Chunlin, Quan Weilong. Correction of Height Measurement Error Arised from Coordinate Confusion in FTP[J]. Laser & Optoelectronics Progress, 2013, 50(6): 061202.

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