[1] Hou W, Wilkening G. Investigation and compensation of the nonlinearity of heterodyne interferometers［J］. Prec. Eng(0141-6359) , 1992, 14:91-98.

[2] Quenelle R C. Nonlinearity in interferometric measurements［J］. Hewlett-Packard J, 1983, 34 : 10.

[3] 侯文玫, 裘惠孚. 塞曼激光的偏振椭圆化对外差式交流比相干涉仪的影响［J］.计量学报, 1988, 9(3):199-202.

    Hou W M, Qiu H F. The influence of elliptical polarization of Zeeman-laser upon the heterodyne phase comparing interferometry［J］. Acta Metrologica Sinica, 1988, 9(3):199-202.

[4] 王锋, 倪维斗.外差式激光干涉仪光学读出的两种新算法的设计与实现［J］.光学技术, 2010, 36(6):885-891.

    Wang F, Ni W T. Design and implementation of two new fitting algorithms for optical readouts of a heterodyne interferometer［J］. Optical Technique, 2010, 36(6):885-891.

[5] Stone J A, Howard L P. A simple technique for observing periodic nonlinearities in Michelson interferometers ［J ］ . Prec Eng(0141-6359), 1998, 22 (4) : 220-232.

[6] Yin C Y, Dai G L, Chao Z X, et al . Determining the residual nonlinearity of a high-precision heterodyne interferometer ［J］ . Opt Eng, 1999, 38(8):1361-1365.

[7] Hou W M, Zhao X. The drift of the nonlinearity of heterodyne interferometers［J］. Prec Eng(0141-6359), 1994, 16(1) : 25-34.

[8] Schmitz T L, Beckwith J F. Acousto-optic displacement - measuring interferometer : a new heterodyne interferometer with Angstrom-level periodic error ［J ］ . J Mod Optic(1362-3044), 2002, 49 (13) : 2105-2114.

[9] 赵勇.传感器与检测技术［M］.北京:机械工业出版社, 2010:35-41.

    Zhao Y. Sensor and measurement technology［M］. Beijing: China Machine Press, 2010:35-41.

[10] 侯文玫, 王俊.外差激光干涉仪非线性的细分和消除［J］.计量学报, 2007, 28(3): 210-215.

    Hou W M; Wang J. Subdivision and elimination of nonlinearity in heterodyne interferometers ［J］. Acta Metrologica Sinica, 2007, 28(3): 210-215.