中国激光, 2017, 44 (6): 0604007, 网络出版: 2017-06-08
基于微机电系统的法布里珀罗可调光滤波器
Tunable Fabry-Perot Optical Filter Based on Micro-Electro Mechanical System
图 & 表
郭智慧, 李拥华, 杨恒, 钟少龙. 基于微机电系统的法布里珀罗可调光滤波器[J]. 中国激光, 2017, 44(6): 0604007. Guo Zhihui, Li Yonghua, Yang Heng, Zhong Shaolong. Tunable Fabry-Perot Optical Filter Based on Micro-Electro Mechanical System[J]. Chinese Journal of Lasers, 2017, 44(6): 0604007.