基于微机电系统的法布里珀罗可调光滤波器

为实现调谐范围宽、调谐速度快、带宽窄、驱动电压低以及可批量化生产的可调光学滤波器, 提出了一种新型微机电系统(MEMS)可调光学滤波器。由高反射率可动光学镜面与准直扩束光纤端面组成法布里-珀罗(F-P)腔。通过静电驱动改变F-P腔的腔长以调整滤波器的输出光波长, 分析了可调光学滤波器的波长调谐原理和静电驱动原理, 给出了器件的结构参数和综合设计考虑。利用体硅加工工艺成功制作了可调光学滤波器样品, 并进行了实验测试。实验结果表明, 通过改变准直扩束光纤的初始位置, 3 dB带宽与自由谱域之间具有可调性。该可调光学滤波器兼备了MEMS技术与光纤技术的优点, 并且结构紧凑、工艺简单、驱动电压低, 可用于光通信等场合。

Abstract

In order to realize the goal of wide tunable range, fast tuning, narrow bandwidth, low actuated voltage, and mass production, a novel tunable optical filter based on micro-electro mechanical system (MEMS) is presented. The Fabry-Perot (F-P) cavity is composed of a movable optical mirror with high reflectance and the face of a fiber collimator. The output wavelength can be adjusted by changing the length of the F-P cavity through the electrostatic drive. The principles of wavelength tuning and electrostatic drive are analyzed. The structural parameters and comprehensive design method are discussed. The tunable filter is fabricated successfully by the bulk silicon technology and the experimental measurement is implemented. The test results show that the device can adjust between the 3 dB bandwidth and the free spectrum range by changing the original position of the fiber collimator. The filter takes the advantages of MEMS and fiber technology with compact structure, simple process and low actuated voltage. The device can be applied in many fields such as optical communications.

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郭智慧, 李拥华, 杨恒, 钟少龙. 基于微机电系统的法布里珀罗可调光滤波器[J]. 中国激光, 2017, 44(6): 0604007. Guo Zhihui, Li Yonghua, Yang Heng, Zhong Shaolong. Tunable Fabry-Perot Optical Filter Based on Micro-Electro Mechanical System[J]. Chinese Journal of Lasers, 2017, 44(6): 0604007.

基于微机电系统的法布里珀罗可调光滤波器

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