静电场辅助的微压印光刻技术
刘民哲, 王泰升, 李和福, 刘震宇, 陈佐龙, 鱼卫星. 静电场辅助的微压印光刻技术[J]. 光学 精密工程, 2017, 25(3): 663.
LIU Min-zhe, WANG Tai-sheng, LI He-fu, LIU Zhen-yu, CHEN Zuo-long, YU Wei-xing. Electrostatic field assisted micro imprint lithography technology[J]. Optics and Precision Engineering, 2017, 25(3): 663.
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刘民哲, 王泰升, 李和福, 刘震宇, 陈佐龙, 鱼卫星. 静电场辅助的微压印光刻技术[J]. 光学 精密工程, 2017, 25(3): 663. LIU Min-zhe, WANG Tai-sheng, LI He-fu, LIU Zhen-yu, CHEN Zuo-long, YU Wei-xing. Electrostatic field assisted micro imprint lithography technology[J]. Optics and Precision Engineering, 2017, 25(3): 663.