光学学报, 2010, 30 (1): 287, 网络出版: 2010-02-01   

倾斜沉积“雕塑”薄膜结构参数优化分析

Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film
作者单位
1 中国科学院 上海光学精密机械研究所,上海 201800
2 上海大恒光学精密机械有限公司,上海 201800
引用该论文

齐红基, 王晴云, 肖秀娣, 易葵, 贺洪波, 范正修. 倾斜沉积“雕塑”薄膜结构参数优化分析[J]. 光学学报, 2010, 30(1): 287.

Qi Hongji, Wang Qingyun, Xiao Xiudi, Yi Kui, He Hongbo, Fan Zhengxiu. Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film[J]. Acta Optica Sinica, 2010, 30(1): 287.

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齐红基, 王晴云, 肖秀娣, 易葵, 贺洪波, 范正修. 倾斜沉积“雕塑”薄膜结构参数优化分析[J]. 光学学报, 2010, 30(1): 287. Qi Hongji, Wang Qingyun, Xiao Xiudi, Yi Kui, He Hongbo, Fan Zhengxiu. Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film[J]. Acta Optica Sinica, 2010, 30(1): 287.

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