光学学报, 2010, 30 (1): 287, 网络出版: 2010-02-01
倾斜沉积“雕塑”薄膜结构参数优化分析
Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film
图 & 表
齐红基, 王晴云, 肖秀娣, 易葵, 贺洪波, 范正修. 倾斜沉积“雕塑”薄膜结构参数优化分析[J]. 光学学报, 2010, 30(1): 287. Qi Hongji, Wang Qingyun, Xiao Xiudi, Yi Kui, He Hongbo, Fan Zhengxiu. Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film[J]. Acta Optica Sinica, 2010, 30(1): 287.