倾斜沉积“雕塑”薄膜结构参数优化分析

齐红基; 王晴云; 肖秀娣; 易葵; 贺洪波; 范正修

doi:doi:10.3788/aos20103001.0287

光学学报, 2010, 30 (1): 287, 网络出版: 2010-02-01

倾斜沉积“雕塑”薄膜结构参数优化分析

Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film

论文大纲

齐红基 ^1,2,*王晴云 ¹肖秀娣 ¹易葵 ¹贺洪波 ¹范正修 ¹

作者单位

¹ 中国科学院上海光学精密机械研究所,上海 201800

² 上海大恒光学精密机械有限公司,上海 201800

摘要

基于双轴双折射薄膜模型,利用在不同入射角度下薄膜对两种偏振态光波透射光谱,同时获得“雕塑”薄膜主轴折射率N1,N2,N3和薄膜厚度d及柱状角β等参数。基于倾斜沉积技术,利用电子束反应蒸发方法制备了氧化钽“雕塑”薄膜。借助于模拟退火算法,对入射角度为0,20°,30°,45°和60°时两种偏振态光波的透射光谱进行拟合,确定了氧化钽“雕塑”薄膜的结构参数,并与场发射扫描电镜测量的薄膜结构进行了比较。结果表明,利用透射光谱曲线可以较为准确地获得“雕塑”薄膜的结构参数。

Abstract

Based on the biaxial birefringent model,the structural parameters of thin film,including the principal refractive indices N1,N2,N3,the thickness d and the column angle β were determined by fitting the measured transmittance spectra for two polarizations at the normal and oblique incidence. With the glancing angle deposited technique,the sculptured tantalum oxide thin films were deposited by reactive electron beam evaporation. The structural parameters were extracted by fitting the measured spectral transmittance curves at the incident angle of 0,20°,30°,45° and 60° with the simulated annealing algorithm. Besides,the tilted nano-column structure,the thickness and the column angle were obtained with the cross section of thin film,examined with scanning electron microscope. The results show that the structure parameters of sculptured thin film can be extracted from the transmittance spectra.

参考文献

[1] . Robbie,M. J. Brett,A. Lakhtakia. Chiral sculptured thin films[J]. Nature, 1996, 384: 616-616.

[2] . Robbie,D. J. Broer,M. J. Brett. Chiral nematic order in liquid crystals imposed by an engineered inorganic nanostructure[J]. Nature, 1999, 399: 764-766.

[3] . Messier,T. Gehrke,C. Frankel et al.. Engineered sculptured nematic thin films[J]. J. Vac. Sci. Technol. A, 1997, 15: 2148-2152.

[4] . Messier,V. C. Venugopal,P. D. Sunal. Origin and evolution of sculptured thin films[J]. J. Vac. Sci. Technol. A, 2000, 18(4): 1538-1545.

[5] . Hodgkinsom,Q. H. Wu. Anisotropic antireflection coatings:design and fabrication[J]. Opt. Lett., 1998, 23(19): 1553-1555.

[6] . C. Yoo,H. P. Shleh. Fabrication and analyses of negative-birefringent thin film compensator with characteristic matrix[J]. J. Optics, 1996, 27(5): 211-215.

[7] . Hodgkinson,Q. H. Wu. Thin-film angle-tuned retarders:theory and fabrication[J]. J. Opt. Soc. Am. A, 2001, 18: 975-979.

[8] . Hodgkinson,Q. H. Wu. Birefringent thin film polarizers for use at normal incidence and with planar technologies[J]. Appl. Phys. Lett., 1999, 74: 1794-1796.

[9] . Hodgkinson,Q. H. Wu,M. Arnold et al.. Biaxial thin-film coated-plate polarizing beam splitters[J]. Appl. Opt., 2006, 45: 1563-1568.

[10] . Pelletier,F. Flory,Y. Hu. Optical characterization of thin films by guided waves[J]. Appl. Opt., 1989, 28: 2918-2924.

[11] . Jnchen,D. Endelema,N. Kaiser et al.. Determination of the refractive indices of highly biaxial anisotropic coatings using guided modes[J]. Pure Appl. Opt., 1996, 5: 405-415.

[12] . M. Wang. Analysis of anisotropic thin film parameters from prism coupler measurements[J]. J. Mod. Opt., 1995, 42: 2173-2181.

[13] . J. Jen,C. H. Hsieh,T. S. Lo. Optical constant determination of an anisotropic thin film via surface plasmon resonance:analyzed by sensitivity calculation[J]. Opt. Commun., 2005, 224: 269-277.

[14] . J. Jen,C. Y. Peng,H. H. Chang. Optical constant determination of an anisotropic thin film via polarization conversion[J]. Opt. Express, 2007, 15: 4445-4451.

[15] . Schubert,W. Dollase. Generalized ellipsometry for biaxial absorbing materials:determination of crystal orientation and optical constants of Sb2S3[J]. Opt. Lett., 2002, 27: 2073-2075.

[16] I. J. Hodgkinson,J. C. Hazel,Q. H. Wu. In situ measurement of principal refractive indices of thin films by two-angle ellipsometry[J]. Thin Solid Films,1998,313-314:368-372

[17] . J. Hodgkinson,Q. H. Wu,J. C. Hazel. Empirical equations for the principal refractive indices and column angle of obliquely deposited films of tantalum oxide,titanium oxide,and zirconium oxide[J]. Appl. Opt., 1998, 37: 2653-2659.

[18] 朱勇,顾培夫,沈伟东等. 射频磁控反应溅射氮氧化硅薄膜的研究[J]. 光学学报,2005,25(4):567-571

Zhu Yong,Gu Peifu,Shen Weidong et al.. Study of silicon oxynitride film deposited by RF magnetron sputtering[J]. Acta Optica Sinica,2005,25(4):567-571

[19] 范平,邵建达,易葵等. 离子束溅射沉积不同厚度铜膜的光学常数研究[J]. 光学学报,2006,26(6):943-947

Fan Ping,Shao Jianda,Yi Kui et al.. Optical constants of ion beam sputtering deposited copper films of different thickness[J]. Acta Optica Sinica,2006,26(6):943-947

[20] 王胭脂,张伟丽,范正修等. SiO2薄膜折射率的准确拟合分析[J]. 中国激光,2008,35(5):760-763

Wang Yanzhi,Zhang Weili,Fan Zhengxiu et al.. Analysis for accurately fitting the refractive index of SiO2 thin film[J]. Chinese J. Lasers,2008,35(5):760-763

[21] . J. Hodgkinson,F. Horowitz,H. A. Macleod et al.. Measurement of the principal refractive indices of thin films deposited at oblique incidence[J]. J. Opt. Soc. Am. A, 1985, 2: 1693-1697.

[22] . J. Qi,X. D. Xiao,H. B. He et al.. Optical properties and microstructure of Ta2O5 biaxial film[J]. Appl. Opt., 2009, 48: 127-133.

[23] F. Horowitz. Structure-induced optical anisotropy in thin film[D]. University of Arizona USA,1983

[24] . J. Qi,D. P. Zhang,J. D. Shao et al.. Matrix analysis of an anisotropic optical thin film[J]. Europhys. Lett., 2005, 70: 257-263.

[25] . Poelman,P. F. Smet. Methods for the determination of the optical constants of thin films from single transmission measurement:a critical review[J]. J. Phys. D:Appl. Phys., 2003, 36: 1850-1857.

[26] . A. Akima. A new method of interpolation and smooth curve fitting based on local procedures[J]. J. Assoc. Comput. Mach., 1970, 17: 589-602.

[27] . G. Dirks,H. J. Leamy. Columnar microstructure in vapor-deposited thin films[J]. Thin Solid Films, 1977, 47: 219-233.

齐红基, 王晴云, 肖秀娣, 易葵, 贺洪波, 范正修. 倾斜沉积“雕塑”薄膜结构参数优化分析[J]. 光学学报, 2010, 30(1): 287. Qi Hongji, Wang Qingyun, Xiao Xiudi, Yi Kui, He Hongbo, Fan Zhengxiu. Determination of Structural Parameters for Obliquely Deposited Sculptured Thin Film[J]. Acta Optica Sinica, 2010, 30(1): 287.

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