光纤激光诱导背面干法刻蚀制备二元衍射光学元件
陈继民, 何超, 周伟平, 申雪飞. 光纤激光诱导背面干法刻蚀制备二元衍射光学元件[J]. 光学 精密工程, 2012, 20(1): 31.
CHEN Ji-min, HE Chao, ZHOU Wei-ping, SHEN Xue-fei. Fabrication of binary diffractive optical element by fiber laser induced backside dry etching[J]. Optics and Precision Engineering, 2012, 20(1): 31.
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陈继民, 何超, 周伟平, 申雪飞. 光纤激光诱导背面干法刻蚀制备二元衍射光学元件[J]. 光学 精密工程, 2012, 20(1): 31. CHEN Ji-min, HE Chao, ZHOU Wei-ping, SHEN Xue-fei. Fabrication of binary diffractive optical element by fiber laser induced backside dry etching[J]. Optics and Precision Engineering, 2012, 20(1): 31.