光学 精密工程, 2012, 20 (1): 31, 网络出版: 2012-02-14
光纤激光诱导背面干法刻蚀制备二元衍射光学元件
Fabrication of binary diffractive optical element by fiber laser induced backside dry etching
Metrics
摘要访问:6441次
PDF 下载:35次
全文浏览:4次
总被查询:1次
陈继民, 何超, 周伟平, 申雪飞. 光纤激光诱导背面干法刻蚀制备二元衍射光学元件[J]. 光学 精密工程, 2012, 20(1): 31. CHEN Ji-min, HE Chao, ZHOU Wei-ping, SHEN Xue-fei. Fabrication of binary diffractive optical element by fiber laser induced backside dry etching[J]. Optics and Precision Engineering, 2012, 20(1): 31.