Overview: Driven by the rapid development of national optical projects such as laser nuclear fusion and aerospace telescopes, as well as high-end civilian fields such as advanced instruments and optical lenses, the requirements for full-frequency domain processing errors and surfaces of optical components are becoming more and more stringent. At this stage, the optical components generally need to go through rough grinding, fine grinding, polishing and coating, and other processes, and their surface quality mainly depends on the defect removal ability and error control level of the polishing process. Whether the fine grinding process can obtain better surface shape accuracy and low surface/subsurface damage suppression determines the processing efficiency, and the ultra-precision processing manufacturing equipment is the premise of the realization of ultra-precision machining of the optical components. So far, all countries in the world have invested in the research and development of optical ultra-precision grinding and polishing technology, and have developed more relatively mature high-precision grinding and polishing equipment, which can better meet the processing needs of most of the current optical components. For the core equipment and key technologies required for ultra-precision manufacturing, China has long relied on imports. In order to break through the bottleneck restricting the development of ultra-precision technology in China at this stage, under the traction and drive of the national large-scale engineering project, China has made remarkable progress in optical ultra-precision manufacturing equipment and technology. However, for the optical ultra-precision technology and equipment, there is still a certain gap between China and the international advanced level, and it is necessary to continue to strengthen the research. In addition to the high-end grinding and polishing equipment necessary for the ultra-precision machining of optical components, it is also necessary to strengthen the technical level of a series of key supporting units, such as ultra-precision grinding and polishing processing technology, high-end key functional components, intelligent monitoring technology of processing environment, efficient ultra-precision machining tools, processing and inspection path planning and compensation processing strategies, computer-aided manufacturing and testing software, etc. The research, development, and application of these technologies are related to the development of high-end manufacturing in the civilian fields and national defense fields, and are also the focus of the country. This paper mainly focuses on the ultra-precision machining of large-diameter optical aspherical components. Starting from the grinding and polishing process route, this paper introduces the long-term research progress of the Precision Engineering Laboratory of Xiamen University in the field of large-diameter optical aspherical component processing, and introduces in detail the technical and system achievements such as ultra-precision grinding and polishing equipment, robot-assisted grinding and polishing, equipment intelligent monitoring system, processing technology and control software.

为实现小曲率凹球面光学玻璃的高效超精密抛光，充分发挥旋转磁场下磁性混合流体兼具黏度和粒子动态分布的特点，提出了一种新型半球头抛光装置。使用Ansoft Maxwell仿真分析轴向充磁圆柱永磁体及其上方分别加装平面铁块和凹面铁块3种磁源结构下的磁场分布，发现加装凹面铁块能强化“边缘效应”，获得更集中分布的大磁场区，进一步仿真优化磁体尺寸和偏心距。比较不同抛光液组分和磁体偏心距下的磁性混合流体行为，确定了抛光液的最佳组分以及磁体偏心距。最后，对曲率半径为15.4 mm、中心深度为2.24 mm的凹球面K9玻璃进行抛光实验，90 min后，面形精度RMS由0.719 μm降低至11.7 nm，表面粗糙度R_a由0.552 μm降低至9.656 nm。新型抛光装置能够实现小曲率凹球面工件的高效纳米级抛光。

为了提高微透镜阵列单点金刚石车削的加工精度与一致性，提出了加工误差的理论模型，并针对其补偿方法进行了理论分析和实验研究。将微透镜阵列加工等效为自由曲面加工，通过建立单点金刚石慢刀伺服切削模型，计算了理论曲面在每一个切削点处沿切削方向的曲率半径；结合刀具等效倾斜角模型和机床加工时延模型，进一步得到了慢刀伺服切削微透镜阵列误差面形的理论预测值。然后，使用原位测量设备测量处理得到实际加工误差，将面形误差理论值与实际加工误差测量值比较，并将面形误差理论值预补偿到加工程序中。实验结果表明，面形误差理论值与实际加工误差测量值具有一致性，两者偏差在［-0.7 μm，0.3 μm］；补偿加工后微透镜阵列的PV值从5.4 μm降低到0.6 μm。所提出的微透镜阵列的单点金刚石车削加工与补偿方法能够预测误差面形，显著提升面形精度与一致性。

研制了一款高频响、高精度及大驱动力的压电驱动型快速刀具伺服（Fast Tool Servo，FTS）装置，采用广义圆锥线拟合的柔性铰链构造新颖的柔性机构，通过对称布置的结构消除柔性刀架工作过程中在非期望运动方向的耦合误差，并对机构的运动学特性进行了综合建模。综合考虑装置行程和固有频率的设计目标，基于改进的BP神经网络优化算法，对柔性机构的结构尺寸进行了多目标优化设计。使用优化后的结构参数建立FTS装置的三维模型并通过ANSYS软件进行有限元分析，分析结果表明，优化后的柔性机构可以达到预期性能要求，验证了该优化算法的可行性。最后，进行了实验样机的制造和性能测试，进一步验证了FTS装置的优化设计结果。测试结果表明：FTS装置的固有频率超过7.6 kHz，标称行程约为6.4 μm，分辨率约为12 nm，跟随精度约为0.3 μm，静态和动态性能均符合设计目标。

X射线聚焦镜用于收集和汇聚宇宙中X射线辐射，是X射线天文卫星观测载荷的核心部件。本文采用镍基底电铸复制方法，在包括化学镀镍磷合金、模具超精密加工、模具镀膜、电铸镍基体以及脱模的全工艺链上进行了大量工艺探索和装备研发，并最终完成了X射线聚焦镜的批量超精密制造。实验结果表明，聚焦镜模具加工精度-表面粗糙度小于0.5 nm RMS，面形精度优于0.5 μm，镜片角分辨率为33.5″HPD（能量半高宽），验证了工艺的可靠性和先进性。

为研究BK7玻璃孔加工过程中出口破损的形成机理，本文在对破损形貌进行显微观测的基础上，基于断裂力学理论，分析了工件加工面所受载荷随裂纹扩展过程的演变规律及其对出口破损形成过程的影响；采用光滑质点流体动力学法对出口破损的形成过程进行了数值模拟，研究了出口破损的形成机理。结果表明：出口破损可分为初始裂纹区及扩展裂纹区，挤压载荷和弯矩的耦合作用驱使初始裂纹沿圆周方向扩展，显著增加了裂纹的倾斜角度和破损宽度，导致破损表面产生大量散射状条纹；借助光滑质点流体动力学法实现了对出口破损形成及脱落过程的数值模拟，发现初始裂纹贯穿整个未穿透厚度，刀具的瞬时切削力减小了78%；并且随着裂纹间歇性地沿圆周方向扩展，刀具切削力呈现出剧烈的周期性波动特征。