半导体光电, 2019, 40 (4): 480, 网络出版: 2019-09-20   

非晶铟镓锌氧化物薄膜晶体管的制备及其光敏特性研究

Fabrication and Photosensitive Properties of Amorphous Indium Gallium Zinc Oxide Thin Film Transistors
作者单位
1 东南大学 1. 成贤学院 电子与计算机工程学院, 南京 210088
2 2. 毫米波国家重点实验室, 南京 210096
3 MEMS教育部重点实验室, 南京 210096
引用该论文

陆清茹, 李帆, 黄晓东. 非晶铟镓锌氧化物薄膜晶体管的制备及其光敏特性研究[J]. 半导体光电, 2019, 40(4): 480.

LU Qingru, LI Fan, HUANG Xiaodong. Fabrication and Photosensitive Properties of Amorphous Indium Gallium Zinc Oxide Thin Film Transistors[J]. Semiconductor Optoelectronics, 2019, 40(4): 480.

参考文献

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    Fang Qingqing. Several key technical issues in the construction of EMS devices based on SmCo-based permanent magnet thin films[C]// China Academic Forum on Functional New Materials and National Academic Conf. on Electromagnetic Materials and Devices, 2012.

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陆清茹, 李帆, 黄晓东. 非晶铟镓锌氧化物薄膜晶体管的制备及其光敏特性研究[J]. 半导体光电, 2019, 40(4): 480. LU Qingru, LI Fan, HUANG Xiaodong. Fabrication and Photosensitive Properties of Amorphous Indium Gallium Zinc Oxide Thin Film Transistors[J]. Semiconductor Optoelectronics, 2019, 40(4): 480.

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