浸没式光刻投影物镜光学薄膜
毕丹丹, 张立超, 时光. 浸没式光刻投影物镜光学薄膜[J]. 中国光学, 2018, 11(5): 745.
BI Dan-dan, ZHANG Li-chao, SHI Guang. Optical calcoatings for projection objective immersion lithography[J]. Chinese Optics, 2018, 11(5): 745.
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[13] 02专项“高NA浸没光学系统关键技术研究”项目顺利通过专项任务内部验收.长春国科精密光学技术有限公司国科资讯[EB/OL].[2018-01-02]. http: //www.cnepo.com.cn/index.php id=1892.
02 special project′Key Technology Research for High NA Immersion Optics System′ passed the internal acceptance of the special task smoothly. Changchun National Extreme Precision Optics Co. Ltd. Information[EB/OL]. [2018-01-02]. http: //www.cnepo.com.cn/index.php id=1892.(in Chinese)
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毕丹丹, 张立超, 时光. 浸没式光刻投影物镜光学薄膜[J]. 中国光学, 2018, 11(5): 745. BI Dan-dan, ZHANG Li-chao, SHI Guang. Optical calcoatings for projection objective immersion lithography[J]. Chinese Optics, 2018, 11(5): 745.