光学学报, 2013, 33 (3): 0331002, 网络出版: 2013-01-16   

可见与近红外宽带减反膜的研制

Study and Fabrication of Visible and Infrared Broadband Antireflection Coating
作者单位
长春理工大学光电工程学院, 吉林 长春 130022
摘要
为满足现代军用综合性光学仪器一机多用的要求,研制了500~1200 nm波段宽带减反膜。采用混合H4、SiO2和MgF2三种材料制备宽带减反膜。通过实验分析了误差产生的原因,并借助膜系设计软件,对结果采用变尺度法进行模拟优化,最后在制备过程中通过改变每层的修正系数,解决了厚度误差对光谱特性的影响,最终用国产真空镀膜机制备了超宽带减反膜,在500~1200 nm波段反射率平均小于0.5%。
Abstract
In order to meet the modern military comprehensive optical instruments′ operating requirements of one-machine multi-purpose, super broadband antireflection coatings with wavelength from 500 nm to 1200 nm are studied and fabricated. The broadband antireflection coatings are fabricated using mixed material H4, SiO2 and MgF2. The error causes are analyzed through experiments, and the result is simulated and optimized by variable metric method with the help of coating design software. By changing the master tooling of each layer in the process of fabrication, the effect of thickness error on the spectral properties is eliminated. Finally, the film is deposited by home-made vacuum coater, and the average reflectivity of the film is below 0.5% over the wavelength range from 500 nm to 1200 nm.
参考文献

[1] 唐晋发, 顾培夫, 刘旭 等. 现代光学薄膜技术[M]. 杭州: 浙江大学出版社, 2006. 81~82

    Tang Jinfa, Gu Peifu, Liu Xu et al.. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006. 81~82

[2] M. Fadel, M. O. A. Azim, O. A. Omer et al.. A study of some optical properties of hafnium dioxide (HfO2) thin films and their applications [J]. Appl. Phys. A, 1998, 66(3): 335~343

[3] Yeuh-Yeong Liou. Digital design of broadband antireflection coating[J]. Jpn. J. Appl. Phys., 2002, 41(9): 5578~5580

[4] 郑臻荣, 顾培夫, 唐晋发 等. 超宽带减反膜的设计和制备[J]. 光学学报, 2009, 29(7): 2026~2029

    Zheng Zhenrong, Gu Peifu, Tang Jinfa et al.. Design and preparation of super broadband antireflection coating[J].Acta Optica Sinica, 2009, 29(7): 2026~2029

[5] 张家斌, 付秀华, 贺才美. 可见与近红外增透膜的设计和制备[J]. 激光与红外, 2009, 39(5): 528~530

    Zhang Jiabin, Fu Xiuhua, He Caimei. Design and fabrication of visible and infrared band broadband AR coating[J]. Laser & Infrared, 2009, 39(5): 528~530

[6] R. R. Willey. Predicting achievable design performance of broadband antireflection coatings[J]. Appl. Opt., 1993, 32(28): 5447~5451

[7] 肖秀娣, 董国平, 邓淞义 等. 热处理对电子束蒸发TiO2雕塑薄膜双折射性能的影响[J]. 中国激光, 2009, 36(8): 2166~2170

    Xiao Xiudi, Dong Guoping, Deng Songyi et al.. Effects of heat treatment on TiO2 sculptured thin films birefringence prepared by electron beam deposition[J]. Chinese J. Lasers, 2009, 36(8): 2166~2170

[8] S. Havelia, K. R. Balasubramaniam, S. Spurgeon et al.. Growth of La2Ti2O7 and LaTiO3 thin film using pulsed laser deposition[J]. J. Cryst. Growth, 2008, 310(7-9): 1985~1990

[9] A. A. Mozhegorov, A. E. Nikiforov, A. V. Larin et al.. Structure and the electronic and magnetic properties of LaTiO3[J]. Phys. Solid State, 2008, 50(9): 1795~1798

[10] 刘春玲, 王春武, 王广德 等. 电子束蒸镀H4膜工艺及其在808 nm激光器腔面膜上的应用[J]. 中国激光, 2010, 37(12): 3140~3144

    Liu Chunling, Wang Chunwu, Wang Guangde et al.. Process investigation of H4 thin film prepared by electron beam evaporation and application on laser diodes cavity coatings[J]. Chinese J. Lasers, 2010, 37(12): 3140~3144

[11] 杨永亮, 付秀华, 刘国军 等. 采用新型混合材料的多波长激光减反射膜的研制[J]. 中国激光, 2011, 38(10): 1007002

    Yang Yongliang, Fu Xiuhua, Liu Guojun et al.. Study and fabrication of multi-wavelength laser antireflection film using new mixed material[J]. Chinese J. Lasers, 2011, 38(10): 1007002

[12] 付秀华, 董连和, 付新华 等. 红外增透与保护膜技术的研究[J]. 激光与红外, 2006, 36(12): 1162~1164

    Fu Xiuhua, Dong Lianhe, Fu Xinhua et al.. Study of infrared AR and protecting coating technology[J]. Laser & Infrared, 2006, 36(12): 1162~1164

[13] 白胜元.光学薄膜设计及其在光波分复用系统中的应用[D].杭州: 浙江大学, 2001. 27~30

    Bai Shengyuan. Design of Optical Thin Film and Applications of Optical Coatings on WDM Systems[D]. Hangzhou: Zhejiang University, 2001. 27~30

付秀华, 孙英杰, 刘冬梅, 张静, 林晶. 可见与近红外宽带减反膜的研制[J]. 光学学报, 2013, 33(3): 0331002. Fu Xiuhua, Sun Yingjie, Liu Dongmei, Zhang Jing, Lin Jing. Study and Fabrication of Visible and Infrared Broadband Antireflection Coating[J]. Acta Optica Sinica, 2013, 33(3): 0331002.

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