UV-LIGA技术制备微型柔性镍接触探针
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明平美, 朱荻, 胡洋洋, 曾永彬. UV-LIGA技术制备微型柔性镍接触探针[J]. 光学 精密工程, 2007, 15(5): 735. 明平美, 朱荻, 胡洋洋, 曾永彬. Fabrication of nickel soft contact microprobe based on UV-LIGA[J]. Optics and Precision Engineering, 2007, 15(5): 735.
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