纳米精度二维工作台测量镜的面形误差在线检测

针对二维工作台测量镜本身的面形误差以及装调等因素引起面形变化对二维工作台定位精度的影响, 提出了一种用于纳米精度二维工作台测量镜面形误差的在线检测方法。利用两路激光干涉仪检测面形微分数据的基本原理, 分析了零点误差和积分累计误差对测量镜面形误差检测的影响并提出了改进方法。利用三路激光干涉仪组成两组不等跨度的检测机构, 得到两组工作台测量镜面形的原始数据, 通过这两组数据之间的关系修正跨度间的面形细节误差, 得到了精确的测量镜面形误差量。对此方法进行了理论推导、仿真计算和实验验证, 并将结果与Zygo干涉仪测量得到的离线检测结果进行了对比, 结果显示其差异在±10 nm之间, 且趋势有较好的一致性。得到的结果验证了提出的方法可正确测量和真实地还原测量镜的面形误差。

Abstract

For the profile deviation of a stage mirror itself and the profile change caused by the alignment of 2D stage position, an online detection method for the profile deviation of a nano precision 2-D stage mirror was presented. The basic principle of detecting profile differential data with two interferometers was proposed. The influences of zero error and integral error on the measurement were analyzed and a method to improve the measuring precision was put forward. Two sets of original data of the mirror profile were obtained by two sets of detectors with different spans composed by three interferometers. Through the relationship between the two sets of data, the detail profile deviation between the spans was modified. The theoretical calculation, simulation and experiments for the proposed method were performed, and obtained results were compared with that of off-line measurement with a Zygo interferometer. The results show that the most difference in test results is between ±10 nm, and the trend has better consistency, which verify that this measuring method could measure the profile deviation of stage mirrors correctly and could restore its surface errors truly.

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刘兆武, 李文昊, 王敬开, 姜珊, 宋莹, 潘明忠, 巴音贺希格. 纳米精度二维工作台测量镜的面形误差在线检测[J]. 光学精密工程, 2016, 24(9): 2134. LIU Zhao-wu, LI Wen-hao, WANG Jing-kai, JIANG Shan, SONG Ying, PAN Ming-zhong, Bayanheshig. Online detection of profile deviation for nano precision 2-D stage mirror[J]. Optics and Precision Engineering, 2016, 24(9): 2134.

纳米精度二维工作台测量镜的面形误差在线检测

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