刘洋 1,2,3朱香平 1,2,3靳川 1,2,3张笑墨 1,2,3赵卫 1,2,3,*
作者单位
摘要
1 中国科学院西安光学精密机械研究所,西安 710119
2 瞬态光学与光子技术国家重点实验室,西安 710119
3 中国科学院大学,北京 100049
采用钛蓝宝石飞秒激光加工系统在融石英表面诱导表面周期性微纳结构,研究了激光诱导表面周期结构的形成过程以及激光能量密度、脉冲数、光斑大小和脉冲的空间间隔对融石英表面激光诱导表面周期结构的形貌的影响。实验结果表明,飞秒激光在融石英表面可以诱导出周期性的亚波长结构,主要以垂直于激光偏振方向的光栅状结构为主,其周期在百纳米量级且具有更好的可复现性。在激光光斑控制在1 μm附近时,所得到的形貌具有较高的规则性。根据实验结果设计了聚焦高斯光斑低通量的加工方式。所制备的光栅结构具有200~300 nm的周期,平均深度约为300 nm。
飞秒激光加工 表面形貌 亚波长结构 融石英 周期性结构 Femtosecond laser processing Surface morphology Subwavelength structures Fused silica Periodic structure 
光子学报
2023, 52(7): 0752307
Author Affiliations
Abstract
1 Thales Research & Technology, 1 Avenue Augustin Fresnel, 91767 Palaiseau, France
2 Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, 07745 Jena, Germany
3 Thales Alenia Space, 5 Allée des Gabians, BP 99, 06156 Cannes la Bocca Cedex, France
4 European Space Research and Technology Centre, Postbus 299, 2200 AG Noordwijk, The Netherlands
We report on subwavelength reflective gratings for hyperspectral applications operating in a very large spectral band (340–1040 nm). Our study concerns a blazed-binary grating having a period of 30 μm and composed of 2D subwavelength structures with size from 120 nm to 350 nm. We demonstrate the manufacturing of the gratings on 3″ wafers by two lithography technologies (e-beam and nanoimprint) followed by classical dry etching process. Optical measurements show that the subwavelength grating approach enables a broadband efficiency, polarization behaviour and wavefront quality improvement with respect to the requirements for the next generation of spectro-imagers for Earth observation missions. An outlook towards spherical substrate based on nanoimprint lithography is also reported with the results of mixed features replication (holes and pillars in the range of 160–330 nm) on a 540 mm concave substrate which demonstrate uniformity and accuracy capabilities over 3″ surface.
Diffraction grating Subwavelength structures Electron beam lithography Nanoimprint lithography Effective index media 
Journal of the European Optical Society-Rapid Publications
2023, 19(1): 2023004
作者单位
摘要
1 广西大学机械工程学院,广西 南宁 530004
2 中国科学院深圳先进技术研究院,广东 深圳 518055
红外光学成像系统的灵敏度与光学窗口透射率密切相关,锗窗口是红外光学系统的常用窗口,在锗窗口上制备亚波长结构可以增强抗反射性能从而提高透射率,且常选择凸面窗口以获得更大的视场角。针对在曲面窗口上亚波长结构的制备工艺较为复杂的难题,本文运用柔性紫外纳米压印方法(soft UV-NIL),在凸面锗窗口表面高效、高质量地制作了亚波长抗反射结构。首先基于时域有限差分方法优化设计了亚波长抗反射结构参数,然后基于soft UV-NIL工艺制备了符合设计要求的亚波长结构。测试结果表明,在3.55~5.55 μm波长范围内,凸面锗窗口单面平均透射率由65.81%提升到78.68%,在波长为4.4 μm处,透射率由65.85%提升至83.13%,实现了中红外宽波段抗反射效果。
光学设计 微结构制造 亚波长结构 柔性紫外纳米压印 抗反射 
激光与光电子学进展
2023, 60(5): 0522001
作者单位
摘要
齐鲁师范学院物理与电子工程学院,山东 济南 250200
为了增强光子芯片与光纤耦合光路设计的灵活性,提高耦合效率,以布拉格条件为基础,设计了一种基于亚波长线光栅的高效垂直光栅耦合器。采用时域有限差分(FDTD)方法建立了光栅耦合器的二维结构模型,系统研究了亚波长线光栅的结构参数对光栅耦合器耦合效率的影响,分析了线光栅的周期、半径、光栅耦合器的上包层及下包层厚度等参数影响耦合效率的物理机制,并对结构进行了优化。结果表明,对于1550 nm波长的TE偏振入射光,当线光栅周期为580 nm,半径为130 nm,下包层厚度为2500 nm,上包层厚度为1400 nm时,可以获得超过91%的垂直耦合效率。提出的亚波长线光栅垂直光栅耦合器耦合效率高、结构简单、易于制备,可以为光栅耦合器的设计提供理论指导和参考。
光栅 亚波长结构 垂直光栅耦合器 耦合效率 
激光与光电子学进展
2021, 58(17): 1705002
Author Affiliations
Abstract
1 Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou 511443, China
2 Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
Plasmonic structural colors have plenty of advantages over traditional colors based on colorants. The pulsed laser provides an important method generating plasmonic structural colors with high efficiency and low cost. Here, we present plasmonic color printing Al nanodisc structures through curvature-driven shape transition. We systematically study the mechanism of morphologic evolution of the Al nanodisc below the thermal melting threshold. A multi-pulse-induced accumulated photothermal effect and subsequent curvature-driven surface atom diffusion model are adopted to explain the controllable shape transition. The shape transition and corresponding plasmonic resonances of the nanodisc can be independently and precisely modulated by controlled irradiations. This method opens new ways towards high-fidelity color prints in a highly efficient and facile laser writing fashion.
photothermal effects color subwavelength structures surface plasmons 
Chinese Optics Letters
2021, 19(5): 053602
滕达 1,2,*王凯 3,**李哲 4曹清 4[ ... ]郭荣珍 1
作者单位
摘要
1 郑州师范学院物理与电子工程学院, 河南 郑州 450044
2 郑州师范学院物理与电子工程学院量子材料研究中心, 河南 郑州 450044
3 中国科学院上海技术物理研究所红外成像材料与探测器重点实验室, 上海 200083
4 上海大学理学院, 上海 200444
提出一种由石墨烯包裹的纳米线和石墨烯层构成的石墨烯间隙波导结构,并采用有限元方法对基模传输特性及其与结构参数、材料参数等的关系进行了详细研究。结果表明:纳米线半径、间隙距离、纳米线介电常数和石墨烯化学势均对模式传输特性有很大影响。通过优化参数,这种结构可以同时实现石墨烯等离激元的长距离传输和模场的深度亚波长约束。采用石墨烯等离激元实现中红外波的深亚波长传输为突破衍射极限光子器件的设计及高密度集成提供了理论基础和指导。
光学器件 波导 表面等离激元 红外波 亚波长结构 
光学学报
2020, 40(6): 0623002
作者单位
摘要
南京邮电大学电子与光学工程学院、微电子学院, 江苏 南京 210023
研究亚波长负折射光栅透镜的柱矢量光束聚焦效应,探索并分析光栅的材料、几何参数等对聚焦效果的影响。亚波长光栅的-1级衍射效应可实现等效负折射现象,结合等光程原理可设计出聚焦平凹镜。利用柱对称坐标系下的有限元算法,分析不同材料折射率、不同等效负折射率、不同预设焦距对实际聚焦效果的影响。结果表明:材料折射率能影响聚焦场的能量效率;等效负折射率为-1时,焦点尺寸最小;预设焦距越小,焦点尺寸越小。聚焦场中纵向电场的比例是影响聚焦场横向尺寸的决定性因素。因此,合理设定光栅负折射率、材料折射率,优化负折射光栅平凹镜设计,能够获得优化的聚焦效果。本工作为柱矢量光束聚焦场调控及相关领域的微纳结构设计提供了参考。
光栅 亚波长结构 透镜 柱矢量光束 负折射 聚焦 
光学学报
2019, 39(11): 1105001
Author Affiliations
Abstract
1 Key Laboratory of Terahertz Solid-State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
We propose and experimentally demonstrate a wideband linear polarization converter in a reflection mode operating from 2.4 to 4.2 THz with conversion efficiency of more than 80%. Our device can expand the applications to a higher frequency band. A numerical simulation is performed for this metamaterial converter, which shows a good agreement with experimental results. Importantly, a concise and intuitive calculating model is proposed for the Fabry–Pérot cavity. The theoretical results indicate that the underlying reason for the enhanced polarization conversion is the additional phase difference induced by the resonance of the meta-structure and multiple reflections within the Fabry–Pérot cavity.
310.5448 Polarization, other optical properties 310.6628 Subwavelength structures,nanostructures 310.6805 Theory and design 240.5445 Polarization-selective devices 
Chinese Optics Letters
2019, 17(9): 093101
Author Affiliations
Abstract
Key Laboratory for Micro/Nano Optoelectronic Devices of Ministry of Education & Hunan Provincial Key Laboratory of Low-Dimensional Structural Physics and Devices, School of Physics and Electronics, Hunan University, Changsha 410082, China
In this Letter, a photonic crystal (PC) flat lens with a scatterer-size gradient is proposed, which simultaneously achieves imaging of the point source and sub-wavelength focusing of the plane wave in the first, second, and fifth bands. The imaging of the point source breaks through the diffraction limit in the second and fifth bands. The PC flat lens with the scatterer-size gradient is expected to be used in a new multifunctional optical imaging and focusing device, which improves the application potential of a PC flat lens.
050.1965 Diffractive lenses 050.5298 Photonic crystals 050.6624 Subwavelength structures 
Chinese Optics Letters
2019, 17(8): 080501
Author Affiliations
Abstract
1 School of Information & Electrical Engineering, Hebei University of Engineering, Handan 056038, China
2 School of Mathematics & Physics, Hebei University of Engineering, Handan 056038, China
3 State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China
We present a perfect graphene absorber with a compound waveguide grating at the near-infrared. The analytical approach is mainly based on the coupled leaky mode theory, which turns the design of the absorber to finding out the required leaky modes supported by the grating structure. Perfect absorption occurs only when the radiative loss of the leaky mode matches the intrinsic absorption loss, which is also named the critical coupling condition. Furthermore, we also demonstrate that the critical coupling of the system can be robustly controlled, and the perfect absorption wavelength can be easily tuned by adjusting the parameters of the compound waveguide grating.
050.6624 Subwavelength structures 140.4780 Optical resonators 
Chinese Optics Letters
2019, 17(1): 010501

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