发光学报, 2016, 37 (2): 192, 网络出版: 2016-03-22
原子层沉积AlOx薄膜对单晶硅太阳能电池钝化机制的影响
Passivation Mechanism of AlOx Thin Film Fabricated on c-Si by Atomic Layer Deposition
引用该论文
张炳烨, 谢洪丽, 方铉, 刘爱民. 原子层沉积AlOx薄膜对单晶硅太阳能电池钝化机制的影响[J]. 发光学报, 2016, 37(2): 192.
ZHANG Bing-ye, XIE Hong-li, FANG Xuan, LIU Ai-min. Passivation Mechanism of AlOx Thin Film Fabricated on c-Si by Atomic Layer Deposition[J]. Chinese Journal of Luminescence, 2016, 37(2): 192.
张炳烨, 谢洪丽, 方铉, 刘爱民. 原子层沉积AlOx薄膜对单晶硅太阳能电池钝化机制的影响[J]. 发光学报, 2016, 37(2): 192. ZHANG Bing-ye, XIE Hong-li, FANG Xuan, LIU Ai-min. Passivation Mechanism of AlOx Thin Film Fabricated on c-Si by Atomic Layer Deposition[J]. Chinese Journal of Luminescence, 2016, 37(2): 192.